Discharge Pumped Rare-Gas Excimer Lasers in Vacuum Ultraviolet Spectral Region
真空紫外光谱区放电泵浦稀有气体准分子激光器
基本信息
- 批准号:04805037
- 负责人:
- 金额:$ 1.22万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for General Scientific Research (C)
- 财政年份:1992
- 资助国家:日本
- 起止时间:1992 至 1993
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Rare gas excimer lasers are atractive vacuum ultraviolet sources with high power tunable output around the center of their spectra. However, their oscillation have been obtained only by electron beam pumping. The electron beam pumped rare gas excimer lasers have difficulties for applications because of their low repitition operation. It, therefore, has been desired the rare gas excimers were considered to produce by three body collisions of an excited rare gas atom with two of ground state atoms. In this case a high pressure operation is favorable, because a formation rate of raer gas excimers is proportional to the square of the gas pressure. It is well known that uniform glow discharges in the high pressure gas are very difficult to establish. We have proposed a new concept of formation of the rare gas excimers in which the rare gas excimers were formed from rare gas clusters in an expanding jet discharge.In this project it has been experimentary confirmed that Xe excimers were forme … More d from the Xe clusters excited by discharge electrons. Distributions of sizes of the Xe clusters were measured with a TOF spectrometer by three photon ionization of the clusters. Densities of the Xe dimers were measured to be 10^<17>cm^<-3> at 3mm down stream of the expanding jet with 3atm.to 8atm.of staggnation pressures. Densities of Xe excimers were measured to be 10^9cm^<-3>, the densities of the clusters were 10^<17>cm^<-3> though. These very low efficiency of excimer formation from the clusters is considered to be unsuitable discharge conditions.In DC sischarges radiative transitions from the ^3SIGMA excimer state were predominant, stimulated emissions, therefore, were not observed because the stimulated emission cross section of ^3SIGMA state was three orders smaller than that of ^1SIGMA state. As a result it is considered that fast pulsed discharges should be essential for obtaining a high laser gain.It is very important to point out that an efficinet vacuum ultraviolet lamp can be produced using the excimer radiation by the ^3SIGMA transitions.In future electron energy dependences of the excitation cross sections of rare gas excimers from the clusters will be measured in order to conclude efficient discharge conditions. Less
罕见的气体原料激光器被吸引的真空紫外线源,其光谱中心周围具有高功率调谐输出。但是,它们的振荡仅通过电子束泵送才能获得。电子束泵送稀有气体准分子激光器由于其低重分操作而难以应用。因此,人们一直在考虑稀有的气体预兆通过带有两个基态原子的令人兴奋的稀有气体原子的三个身体碰撞产生。在这种情况下,高压操作是有利的,因为RAER气体进料器的形成速率与气压平方成正比。众所周知,在高压气体中均匀的发光排放非常困难。我们提出了一个新的概念,即形成稀有的气体进取剂,其中稀有的气体排斥剂是由稀有气体簇在扩展的喷射放电中形成的。在该项目中,实验证实,XE XE准分子是由排放电子激发的XE群集的形成。 XE簇的大小的分布通过簇的三个光子电离测量。测量Xe二聚体的密度为10^<17> cm^<-3>在3毫米向下延伸喷气流的3mm下方,用3atm.to 8atm. 8atm.of停滞压力。测量Xe准分子的密度为10^9cm^<-3>,簇的密度为10^<17> cm^<-3>。这些从集群中形成的准分子形成非常低的效率被认为是不合适的放电条件。在DC Sischuse中,从 ^3sigma compimer态的辐射过渡是主要的,因此未观察到刺激的排放,因为 ^3sigma状态的刺激发射截面是 ^3sigma状态的刺激横截面,这是 ^3sigma状态小于 ^1sigmma sysigma sysigma的三个阶。结果,认为快速脉冲放电对于获得高激光器的增益至关重要。指出,可以使用 ^3sigma Transitions的Eximer辐射来产生有效的真空吸尘器紫外线灯。未来的电子能量依赖性的Equimer辐射。从未来的电子能量依赖群体的稀有气体进料器的令人兴奋的群体偏见的群体依赖性将均应衡量列出的情况下,以包括有效的条件。较少的
项目成果
期刊论文数量(54)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
W.Sasaki: "Discharge-pumped rare gas excimer lasers" CLEO'92 1992 Technical Digest. 12. 112-113 (1992)
W.Sasaki:“放电泵浦稀有气体准分子激光器”CLEO92 1992 技术文摘。
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R.Matsumoto, M.Katto, M.Okuda, K.Kurosawa W.Sasaki Y.Takigawa: "Beam profile measurement on an argon excimer laser with imaging plates" The Rev.Laser Engineering. vol.20. 738-745 (1992)
R.Matsumoto、M.Katto、M.Okuda、K.Kurosawa W.Sasaki Y.Takikawa:“使用成像板在氩准分子激光器上进行光束轮廓测量”Rev.Laser Engineering。
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松園 清吾: "新しい希ガスエキシマ生成法による準連続誘導放出光の発生" 宮崎大学工学部研究報告. 38. 175-182 (1992)
Seigo Matsuzono:“通过新的惰性气体准分子产生方法产生准连续受激发射光”宫崎大学工程学院研究报告 38. 175-182 (1992)。
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小曽根 伸憲: "希ガスエキシマ生成断面積計測システムの検討" 宮崎大学工学部研究報告. 38. 79-86 (1993)
臭氧信则:《稀有气体准分子产生截面积测量系统的研究》宫崎大学工学部研究报告38. 79-86 (1993)。
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M.Ohmukai, H.Naito, M.Okuda, K.Kurosawa, W.Sasaki T.Matsushita Y.Tsunawaki, S.Nozawa & T.Igarashi: "Silicon precipitation induced by argon excimer laser in surface layrs of Si_3N_4" Jpn.J.Appl.Phys.vol.32, Part2, #8A. L1062-L1065 (1993)
M.Ohmukai、H.Naito、M.Okuda、K.Kurosawa、W.Sasaki T.Matsushita Y.Tsunawaki、S.Nozawa
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SASAKI Wataru其他文献
SASAKI Wataru的其他文献
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{{ truncateString('SASAKI Wataru', 18)}}的其他基金
Assessments of wave energy resources around Japan
日本各地波浪能资源评估
- 批准号:
25340131 - 财政年份:2013
- 资助金额:
$ 1.22万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
Happiness's universality and transcendence of the common good-Deployment of the human theory in Thomas Aquinas-
幸福的普遍性和对共同利益的超越——托马斯·阿奎那的人性理论的展开——
- 批准号:
19520037 - 财政年份:2007
- 资助金额:
$ 1.22万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
Ultrahigh peak power vacuum ultraviolet laser and its applications
超高峰值功率真空紫外激光器及其应用
- 批准号:
10044167 - 财政年份:1998
- 资助金额:
$ 1.22万 - 项目类别:
Grant-in-Aid for Scientific Research (B).
Generation of Broadband Tunable Coherent X-rays by Using Optical Field Induced Ionization
利用光场诱导电离产生宽带可调谐相干 X 射线
- 批准号:
09450033 - 财政年份:1997
- 资助金额:
$ 1.22万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
VACUUM ULTRAVIOLET LASERS BY RARE GAS CLUSTERS EXCITATION
稀有气体团簇激发真空紫外激光器
- 批准号:
06452205 - 财政年份:1994
- 资助金额:
$ 1.22万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
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稀有气体基质、超音速簇束和超流氦纳米液滴中光致分子内电子转移反应的比较光谱研究
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14540479 - 财政年份:2002
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Experimental studies on Feshbach-type resonances on rare gas clusters
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10640498 - 财政年份:1998
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