An Attempt to In-situ Visualization for the Distribution of Reacting Radical Ion Species in DC Are Plasma

直流等离子体中反应自由基离子种类分布的原位可视化尝试

• 批准号: 05453089
• 负责人: TOMII Yoichi
• 金额: $ 4.48万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05453089/
• 关键词: active radical ion; spectrometer; diamond; in-situ visualization; spatial distribution; モノクロメーター; inn-situ可視化; プラズマ; プラズマ反応; プラズマ発光; in-situ; 画像解析; 活性ラディカルイオン種; プラズマ分光; VTR

By means of plasma ion reactions, synthesis of micro-poly-crystalline diamond and formation of hgh functional films such as nitride, carbide and oxide on other functional solids (conducting electrode, magnetic materials) were performed. Identification for synthesized or formed substances was conducted by several machines for surface analysis belonged to our institution.The role of active radical ion species in DC are plasma were cleared through showing the spatial distributions of radical ion species by computer controlled spectrometer. The detection of special ion special ion species was measured by a precision spectrometer with high speed step scanning mode.The first purpose of this project, in-situ visualization of the spatial distributions of radical ion species, could be possible by digital transferring the spectrometrical intensities of special ion to those in brightness and color change on monitor TV.And all digital data of these graphical results ere recorded on the disk for computer.Also, theoretical analysis for obtained spectrum distributions was attempt by computer calculation under the equilibrium and non-equilibrium thermodynamic assumption.The second or final purpose of this project will be finished to establish the optimum plasma conditions to from high functional materials by comparing and considering the experimental and theoretical results.

通过等离子体离子反应，合成微多晶金刚石，并在其他功能固体（导电电极、磁性材料）上形成氮化物、碳化物、氧化物等高功能薄膜。通过本机构的多台表面分析仪器对合成或形成的物质进行鉴定。通过计算机控制的光谱仪显示自由基离子种类的空间分布，明确了直流等离子体中活性自由基离子种类的作用。特殊离子特殊离子种类的检测是通过高速步进扫描模式的精密光谱仪进行测量的。该项目的第一个目的是通过数字化传输光谱强度来实现自由基离子种类空间分布的原位可视化特殊离子对监视器电视上亮度和颜色变化的影响。这些图形结果的所有数字数据都记录在计算机磁盘上。此外，通过计算机计算在平衡和非平衡状态下尝试对获得的光谱分布进行理论分析热力学该项目的第二个或最终目的将通过比较和考虑实验和理论结果来完成建立高功能材料的最佳等离子体条件。

项目成果

Y.Tomii: "The Effect of Phase Change of Li-Al Alloy Electrode on Thermoelectric Power in LiCl-KCl Eutectic System" DENKI KAGAKU. 61. 736-737 (1993)

Y.Tomii：“Li-Al合金电极的相变对LiCl-KCl共晶体系中热电势的影响”电气化学。

H.Kuwahara: "Plasma Nitriding of Iron Alloys" J.J.Soc.Pow.& Pow.Met.vol.41. 1341-1351 (1994)

H.Kuwahara：“铁合金的等离子氮化”J.J.Soc.Pow。

Y.Kusano: "Chemical Stability of the Bi-2223 Phase" J.J.Soc.Pow.& Pow.Met.vol.40. 1057-1060 (1993)

Y.Kusano：“Bi-2223 相的化学稳定性”J.J.Soc.Pow。

冨井洋一: "二次イオン質量分析法によるチタン中酸素の定量" 日本金属学会誌. 57. 1421-1425 (1993)

Yoichi Tomii：“通过二次离子质谱法测定钛中的氧”，日本金属学会杂志 57. 1421-1425 (1993)。

高田潤: "鉄合金のプラズマ窒化" 粉体および粉末冶金. 41. 1341-1351 (1994)

Jun Takada：“铁合金的等离子氮化”粉末和粉末冶金。 41. 1341-1351 (1994)