An Attempt to In-situ Visualization for the Distribution of Reacting Radical Ion Species in DC Are Plasma

直流等离子体中反应自由基离子种类分布的原位可视化尝试

• 批准号: 05453089
• 负责人: TOMII Yoichi
• 金额: $ 4.48万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05453089/
• 关键词: active radical ion; spectrometer; diamond; in-situ visualization; spatial distribution; モノクロメーター; inn-situ可視化; プラズマ; プラズマ反応; プラズマ発光; in-situ; 画像解析; 活性ラディカルイオン種; プラズマ分光; VTR

By means of plasma ion reactions, synthesis of micro-poly-crystalline diamond and formation of hgh functional films such as nitride, carbide and oxide on other functional solids (conducting electrode, magnetic materials) were performed. Identification for synthesized or formed substances was conducted by several machines for surface analysis belonged to our institution.The role of active radical ion species in DC are plasma were cleared through showing the spatial distributions of radical ion species by computer controlled spectrometer. The detection of special ion special ion species was measured by a precision spectrometer with high speed step scanning mode.The first purpose of this project, in-situ visualization of the spatial distributions of radical ion species, could be possible by digital transferring the spectrometrical intensities of special ion to those in brightness and color change on monitor TV.And all digital data of these graphical results ere recorded on the disk for computer.Also, theoretical analysis for obtained spectrum distributions was attempt by computer calculation under the equilibrium and non-equilibrium thermodynamic assumption.The second or final purpose of this project will be finished to establish the optimum plasma conditions to from high functional materials by comparing and considering the experimental and theoretical results.

通过血浆离子反应，对其他功能固体（导电，磁性材料）进行了微晶钻石的合成以及HGH功能膜的形成，例如氮化物，碳化物和氧化物。通过几台机器进行了合成或形成的物质的鉴定，用于表面分析属于我们的机构。通过显示计算机控制光谱仪的自由基离子物种的空间分布，从而清除了活性自由基物种在DC中的作用。通过具有高速步骤扫描模式的精确光谱仪来测量特殊离子特殊离子物种的检测。该项目的第一个目的，可以通过数字传输特殊离子的光谱频率来录制了这些数字分析，并且可以通过数字录制了这些数字数据，可以通过数字传输自由基离子物种的空间分布的原位可视化。在平衡和非平衡热力学假设下尝试通过计算机计算获得的频谱分布。该项目的第二或最终目的将完成，以通过比较和考虑实验和理论结果来确定从高功能材料的最佳等离子体条件。

项目成果

Y.Tomii: "The Effect of Phase Change of Li-Al Alloy Electrode on Thermoelectric Power in LiCl-KCl Eutectic System" DENKI KAGAKU. 61. 736-737 (1993)

Y.Tomii：“Li-Al合金电极的相变对LiCl-KCl共晶体系中热电势的影响”电气化学。

T.Niinae: "Mechanical Grinding and Reforming Process of the Bi-2201 Phase" J.J.Soc.Pow.& Pow.Met.vol.40. 1065-1068 (1993)

T.Niinae：“Bi-2201 相的机械研磨和重整过程”J.J.Soc.Pow。

K.Amezawa: "The Single Electrode Peltier Heats of Li-Al Alloy Electrodes in LiCl-KCl Eutectec System" J.Electrochem.Soc.vol.141. 3096-3103 (1994)

K.Amezawa：“LiCl-KCl Eutectec 系统中 Li-Al 合金电极的单电极帕尔贴热”J.Electrochem.Soc.vol.141。

Y.Kusano: "Phase and their Relations in the BiO_<1.5>-SrO (SrCO_3) -CuO System at 720C" J.J.Soc.Pow.& Pow.Met.vol.40. 1049-1052 (1993)

Y.Kusano：“720C 下 BiO_<1.5>-SrO (SrCO_3) -CuO 体系中的相及其关系”J.J.Soc.Pow。

J.Takada, Y.Tomii, N.Yoshida, M.Sasaki and M.Koiwa: "Internaloxidation of Dilute Silver Alloys" Oxidation of Metals. 37. 13-22 (1992)

J.Takada、Y.Tomii、N.Yoshida、M.Sasaki 和 M.Koiwa：“稀银合金的内部氧化”金属的氧化。