A Study on Absolute Evaluation of Fracture Strength of Thin Films by Indentation

压痕法绝对评价薄膜断裂强度的研究

基本信息

批准号：
02452098
负责人：
ICHIKAWA Masahiro
金额：
$ 4.42万
依托单位：
The University of Electro-Communications
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1992
项目状态：
已结题

项目摘要

In this research, a method was proposed to evaluate absolutely fracture strength of a thin film coated on a substrate by indenting a spherical indenter, and feasibility and usefulness of the method were studied. The term "absolutely" was used to intend that the proposed method was not for mere relative evaluation of different films. When a spherical indenter is indented to a brittle film coated on a substrate and the indentation load is increased, a ring crack is formed in the film. By measuring the ring crack initiation load and analying the stress field in the film, it is expected that fracture strength of the film can be obtained. The results of the present research are summarized as follows.1. In this research, a SiO_2 film of 2mum thickness coated on a SUS440C substrate by ion beam spattering was indented using s SIC spherical indenter of 750mum radius. Evaluation of its fracture strength required stress anlysis as well as indentation experiments. An elastic finite element stress … More analysis was first carried out. An approximate expression was derived for the stress field of the film when the film thickness was much smaller than the radius of the contact circle.2. For taking into account plastic deformation of the SUS440C substrate under indentation, an elasto-plastic finite element stress analysis was then carried out. It was found that the radial tensile stress appears in the film outside the contact circle in this case too.3. Before evaluation of fracture strength of the film, the proposed method was applied to evaluation of fracture strength of a bulk material. An indentation experiment was carried out on a sodalime glass plate. It was confirmed that fracture strength could be evaluated properly using the proposed method.4. The fracture strength of a SiO_2 film coated on a SUS440C substrate was evaluated by indenting a SiC spherical indenter. In order to take into account the size effect, a probabilistic treatment using a Weibull distribution was employed. The residual compressive stress in the film was also taken into account. A reasonable value was obtained for the fracture strength of the film. Less

在这项研究中，提出了一种评估A的断裂强度，并研究了该方法的“绝对”术语。环形裂纹是通过环裂启动载荷形成的。通过750mum半径的S SIC球形涂层在SUS440C上覆盖。接触圆。考虑到凹痕的塑性变形，在cacle以外的膜中进行了弹性塑料元素应力应力用于评估块状材料的断裂强度。为了考虑到Eze的大小，胶片中的差异也是造成的。