Developmental Study on a compact He/Ar/XeCl Excimer Laser with Automatic Preionization

紧凑型He/Ar/XeCl自动预电离准分子激光器的研制

基本信息

批准号：
59850063
负责人：
GOTO Toshio
金额：
$ 1.98万
依托单位：
Nagoya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1984
资助国家：
日本
起止时间：
1984 至 1985
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-59850063/
关键词：
XeCl excimer laser automatic preionization He Ar gas mixture Ne discharge-pumped 紫外レーザ

项目摘要

In this research project, the developmental studies on the dischargepumped gas-mixture XeCl laser with automatic preionization have been carried out and the following results have been obtained.1. Characteristics of the XeCl 308 nm laser output energy using the Ar/He gas mixture have been investigated and the optimum gas pressure conditions for obtaining the maximum laser output energy have been determined.2. Characteristics of the XeCl 308 nm laser output energy using the Ne/Ar gas mixture instead of Ar/He gas mixture have been investigated and it has been shown that the Ne/Ar/XeCl laser has the larger laser output energy at total gas pressures below 2 atmospheres than the Ar/He/XeCl, He/XeCl and Ar/XeCl lasers do. The optimum gas pressure conditions for obtaining the maximum laser output energy also have been determined.3. It has been shown from the results of 1. and 2. that the Ar/He/XeCl laser and Ne/Ar/XeCl laser have the relatively large laser output energies and the relatively long lifetimes at total gas pressures below 2 atmospheres, and hence it is possible to construct the compact laser device.4. The compact and low-inductance XeCl laser with automatic preionization has been designed in which the spark gas and laser head have been assembled in one body. Under the optimum gas pressure conditions, the dependences of the laser output energy on the circuit parameters and the configuration of preionizer gap pins have been investigated and the optimum conditions have been determined. It has been, moreover, that the present XeCl laser operated under the optimum conditions has the excellent reproducibility of the shotto shot laser pulses and the relatively long lifetime.5. Based on the above results, finally the improved gas mixture XeCl laser device has been designed and constructed.

本课题对自动预电离放电泵浦混合气体XeCl激光器进行了开发研究，取得了以下成果： 1．研究了Ar/He混合气体的XeCl 308 nm激光输出能量的特性，确定了获得最大激光输出能量的最佳气压条件。 2．研究了使用Ne/Ar混合气体代替Ar/He混合气体的XeCl 308 nm激光输出能量的特性，结果表明，在低于总气压的情况下，Ne/Ar/XeCl激光器具有较大的激光输出能量比 Ar/He/XeCl、He/XeCl 和 Ar/XeCl 激光器低 2 个大气压。确定了获得最大激光输出能量的最佳气压条件。 3．由1和2的结果表明，Ar/He/XeCl激光器和Ne/Ar/XeCl激光器在总气压低于2个大气压时具有较大的激光输出能量和较长的寿命，因此可以构造紧凑型激光装置。 4．设计了一种具有自动预电离功能的紧凑型低电感XeCl激光器，其中火花气体和激光头组装在一体。在最佳气压条件下，研究了激光输出能量对电路参数和预电离器间隙针配置的依赖性，并确定了最佳条件。此外，目前在最佳条件下工作的XeCl激光器具有良好的逐次激光脉冲重复性和相对较长的寿命。 5．基于上述结果，最终设计并构建了改进的混合气体XeCl激光装置。