Developmental Study on a compact He/Ar/XeCl Excimer Laser with Automatic Preionization

紧凑型He/Ar/XeCl自动预电离准分子激光器的研制

基本信息

批准号：
59850063
负责人：
GOTO Toshio
金额：
$ 1.98万
依托单位：
Nagoya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1984
资助国家：
日本
起止时间：
1984 至 1985
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-59850063/
关键词：
XeCl excimer laser automatic preionization He Ar gas mixture Ne discharge-pumped 紫外レーザ

项目摘要

In this research project, the developmental studies on the dischargepumped gas-mixture XeCl laser with automatic preionization have been carried out and the following results have been obtained.1. Characteristics of the XeCl 308 nm laser output energy using the Ar/He gas mixture have been investigated and the optimum gas pressure conditions for obtaining the maximum laser output energy have been determined.2. Characteristics of the XeCl 308 nm laser output energy using the Ne/Ar gas mixture instead of Ar/He gas mixture have been investigated and it has been shown that the Ne/Ar/XeCl laser has the larger laser output energy at total gas pressures below 2 atmospheres than the Ar/He/XeCl, He/XeCl and Ar/XeCl lasers do. The optimum gas pressure conditions for obtaining the maximum laser output energy also have been determined.3. It has been shown from the results of 1. and 2. that the Ar/He/XeCl laser and Ne/Ar/XeCl laser have the relatively large laser output energies and the relatively long lifetimes at total gas pressures below 2 atmospheres, and hence it is possible to construct the compact laser device.4. The compact and low-inductance XeCl laser with automatic preionization has been designed in which the spark gas and laser head have been assembled in one body. Under the optimum gas pressure conditions, the dependences of the laser output energy on the circuit parameters and the configuration of preionizer gap pins have been investigated and the optimum conditions have been determined. It has been, moreover, that the present XeCl laser operated under the optimum conditions has the excellent reproducibility of the shotto shot laser pulses and the relatively long lifetime.5. Based on the above results, finally the improved gas mixture XeCl laser device has been designed and constructed.

在这项研究项目中，已经进行了具有自动预离子的排放泵混合XECL激光的发育研究，并获得了以下结果。1。已经研究了使用AR/HE气体混合物的XECL 308 nm激光输出能的特性，并确定了获得最大激光输出能的最佳气压条件。2。已经研究了使用NE/AR气体混合物代替AR/HE气体混合物的XECL 308 nm激光输出能的特性，并且已经证明NE//AR/XECL激光在2低于AR/HE/HE/XECL，HE/XECL和AR/AR/AR/AR/AR/XECL LASERES的NE/AR/AR/XECL激光器具有更大的激光输出能量。还确定了获得最大激光输出能的最佳气压条件。3。从1和2的结果表明，AR/HE/XECL激光器和NE/AR/XECL激光具有相对较大的激光输出能和相对较长的寿命，在总体压力下，气体压力低于2个气氛，因此可以构建紧凑型激光器设备。4。已经设计了具有自动预离子的紧凑型XECL激光器，在一个体内组装了火花气和激光头。在最佳气压条件下，已经研究了激光输出能量对电路参数的依赖性，并且已经研究了前离离子间隙引脚的配置，并确定了最佳条件。此外，目前在最佳条件下运行的XECL激光具有shotto hotto shott射击激光脉冲和相对较长寿命的极好的可重复性。5。基于上述结果，最终设计和构建了改进的气体混合物XECL激光器设备。