Investigation of the mechanisms during sintering process modifications of multi-component sputter materials and the phase specific deposition of AlCrSi(W,Ta)N

研究多组分溅射材料烧结工艺改进和 AlCrSi(W,Ta)N 相特定沉积的机理

• 批准号: 394475086
• 负责人: Professor Dr.-Ing. Wolfgang Tillmann
• 金额: --
• 依托单位: Lehrstuhl für Werkstofftechnologie (LWT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 2022-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/394475086?language=en
• 关键词: Investigation; mechanisms; during; sintering; process

This research project investigates interactions of sintering processes for multi-component target materials, which are subsequently used for the formation of nanocomposite structures. The AlCrSiN system, consisting of nanocrystalline grains (nc (Al,Cr)N), embedded in an amorphous matrix (a-Si3N4), is the basis for this structure. It is the aim of this project to understand the mechanisms that lead to an increase of the hardness as well as the wear and oxidation resistance by doting the coating system with tungsten and tantalum. Fundamental analyses of sintering processes for the CrSi(W, Ta) system are used to synthesize target segments with a low porosity, which are embedded in a monolithic aluminum body.Sintering parameters such as the temperature, pressure, sintering time and the stoichiometry that support diffusion and compaction, are modified while hot pressing CrSi(W, Ta). So far, the resulting diffusion and phase formation mechanisms have not been explored. Finely dispersed nanopowders are used for the refractory metals W and Ta to accelerate the diffusion velocity. Powder particle agglomerations are avoided by powder coatings, applied by means of Arc-PVD to achieve a homogenous distribution of particles in the sintered segments. Based on a simulation-assisted selection of the basic materials, sintering with solid/liquid phases is realized to foster a balanced formation of intermetallic phases in order to identify porosity-minimizing mechanisms caused by process modifications. The nanostructures of reactively deposited AlCrSi(W, Ta)N layers are correlated with the intermetallic phases in the target material by stoichiometric variations in the CrSi(W, Ta) segments as well as the number of segments in the Al target. The variations of Si, W, and Ta contents are of particular interest when investigating AlCrSi(W, Ta)N films as they enable both grain-refining as well as solid solution hardening mechanisms, thus positively influencing the hardness, wear, and oxidation resistance.The overall objective of this research project is to holistically combine the results of the analyses of the interactions between the chemical compositions and phase compositions of new target materials with the resulting tribo-mechanic coating properties of nanocomposite structures. Especially, the influence of the W and Ta contents on the oxidation behavior is closely scrutinized. Finally, the examined AlCrSi(W, Ta)N coating systems will be applied on cutting tools to analyze the influence of the doping elements and to verify these influences under real production conditions.

该研究项目研究了多组分靶材料的烧结过程的相互作用，这些材料随后用于形成纳米复合材料结构。 AlCrSiN 系统由嵌入非晶基体 (a-Si3N4) 中的纳米晶粒 (nc (Al,Cr)N) 组成，是该结构的基础。该项目的目的是了解通过在涂层系统中添加钨和钽来提高硬度以及耐磨性和抗氧化性的机制。对 CrSi(W, Ta) 系统烧结过程的基本分析用于合成具有低孔隙率的靶段，这些靶段嵌入整体式铝体中。支持的温度、压力、烧结时间和化学计量等烧结参数扩散和压实，在热压CrSi(W，Ta)时进行改性。到目前为止，尚未探索由此产生的扩散和相形成机制。难熔金属W和Ta采用细分散的纳米粉末来加速扩散速度。粉末涂层可避免粉末颗粒团聚，并通过 Arc-PVD 进行涂覆，以实现颗粒在烧结段中的均匀分布。基于模拟辅助选择的基本材料，实现了固/液相烧结，以促进金属间相的平衡形成，从而确定工艺修改引起的孔隙率最小化机制。反应沉积的 AlCrSi(W, Ta)N 层的纳米结构通过 CrSi(W, Ta) 段的化学计量变化以及 Al 靶材中的段数与靶材料中的金属间相相关。在研究 AlCrSi(W, Ta)N 薄膜时，Si、W 和 Ta 含量的变化特别令人感兴趣，因为它们能够实现晶粒细化和固溶硬化机制，从而对硬度、耐磨性和抗氧化性产生积极影响该研究项目的总体目标是将新目标材料的化学成分和相成分之间相互作用的分析结果与由此产生的纳米复合材料结构的摩擦力学涂层性能相结合。特别是，W 和 Ta 含量对氧化行为的影响受到密切关注。最后，将所研究的 AlCrSi(W, Ta)N 涂层系统应用于切削刀具上，分析掺杂元素的影响，并在实际生产条件下验证这些影响。