Ultra-compact Sub-mm Heterodyne Focal Plane Array Frontends for Radio Astronomical Observation

用于射电天文观测的超紧凑亚毫米外差焦平面阵列前端

• 批准号: 21H01134
• 负责人: SHAN Wenlei
• 金额: $ 10.9万
• 依托单位: National Astronomical Observatory of Japan
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2021
• 资助国家: 日本
• 起止时间: 2021-04-01 至 2026-03-31
• 项目状态: 未结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21H01134/
• 关键词: Focal plane array; SIS mixer; Radio astronomy; planar OMT; Focal Plane Array; Heterodyne; SIS Mixer; Radio Astronomy

Three significant achievements have been made in the development of MMIC SIS mixers. Firstly, a microfabrication method for on-chip resistors was established, allowing for the successful fabrication of NbTiN thin-film resistors with a wide range of resistivity. The method were published in the international journal "Thin Solid Films" and are crucial for the development of MMIC SIS mixers. Secondly, we conducted an experiment to investigate the performance of silicon membrane waveguide transitions, a key component in MMIC mixers. The results, which agreed well with theoretical predictions, were accepted for publication. Lastly, we identified the primary cause of crosstalk in MMIC mixer chips and developed a fabrication process for through-substrate via-holes in the chips. The results showed that conductive via-holes can be fabricated using a non-Bosch silicon etching process and will be published in IEEE Trans. On Applied Superconductivity. These achievements are significant in advancing the understanding of reactive plasma processes and will allow for the continued development of MMIC SIS mixers.

MMIC SIS 混频器的开发取得了三项重大成果。首先，建立了片上电阻的微细加工方法，成功制作了宽电阻率范围的NbTiN薄膜电阻。该方法发表在国际期刊《Thin Solid Films》上，对于 MMIC SIS 混合器的开发至关重要。其次，我们进行了一项实验来研究 MMIC 混频器的关键组件硅膜波导转换的性能。结果与理论预测非常吻合，被接受发表。最后，我们确定了 MMIC 混频器芯片中串扰的主要原因，并开发了芯片中穿衬底通孔的制造工艺。结果表明，可以使用非博世硅蚀刻工艺来制造导电通孔，并将在 IEEE Trans 上发表。论应用超导性。这些成就对于增进对反应等离子体过程的理解具有重要意义，并将促进 MMIC SIS 混合器的持续开发。

项目成果

反応性マグネトロンスパッタリング法により作製した超伝導MMIC用低温NbTiN薄膜抵抗器

反应磁控溅射法制备超导MMIC用低温NbTiN薄膜电阻

• 发表时间: 2022
• 作者: 単文磊;江崎翔平
• 通讯作者: 江崎翔平

Measurement of Transmission Losses of Superconducting Coplanar Waveguide and Microstrip Line with On-chip Resonators at 2 mm Wavelength

使用片上谐振器测量 2 mm 波长超导共面波导和微带线的传输损耗

• 发表时间: 2022
• 作者: Wenlei Shan and Shohei Ezaki

Measurement of Transmission Loss of a Superconducting Transmission Line with On-chip Resonators at 2mm Wavelength

使用片上谐振器测量 2mm 波长超导传输线的传输损耗

• 发表时间: 2022
• 作者: W. Shan;and S. Ezaki
• 通讯作者: and S. Ezaki

Development of Through-Substrate Via Process for Silicon-Based Monolithic Microwave Integrated Circuits SIS Mixer

硅基单片微波集成电路SIS混频器穿衬底通孔工艺的开发

• 发表时间: 2022
• 作者: Shohei Ezaki;and Wenlei Shan
• 通讯作者: and Wenlei Shan

Experimental Study of Silicon Membrane Based Superconducting Waveguide-to- CPW Transitions

基于硅膜的超导波导-共面波导转变的实验研究

• 发表时间: 2023
• 作者: Akihiro Masukura;Wenlei Shan;Shohei Ezaki;Takafumi Kojima;Tac Nakajima;and Akira Mizuno
• 通讯作者: and Akira Mizuno