Scanning Probe Processing of 2D Materials

二维材料的扫描探针加工

基本信息

批准号：
315857893
负责人：
Professor Dr.-Ing. Sergej Fatikow
金额：
--
依托单位：
Abteilung Mikrorobotik und Regelungstechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2016
资助国家：
德国
起止时间：
2015-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/315857893?language=en
关键词：
Scanning Probe Processing 2D Materials

项目摘要

Two-dimensional (2D) materials have attracted a lot of attention within the last few years owing the unique properties that emerge when these materials are isolated. Thus, the interest to apply the inherent properties of 2D materials in different kinds of novel applications constantly increases.So far, most of the prototypic devices that incorporate 2D materials have been fabricated by implementing resist-based, wet-chemical lithographical techniques. However, these resist-based processes commonly leave substantial amounts of residuals that contaminate the 2D materials and induce considerable deteriorations of their excellent and desired properties. Hence, the development of resist-free and reliable lithographical procedures is of crucial importance for exploiting the full performance potential of devices based on 2D materials.A promising methodology for enabling resist-free lithographical processing of 2D materials is based on the scanning probe approach that is capable of inducing local modifications of materials with nanoscale spatial resolution. However, until now, thorough studies of scanning probe based lithographical processes on 2D materials are still limited or even unavailable.This project aims at inducing and evaluating scanning probe based lithographical processes on selected 2D materials. To achieve this goal, a tailored robotic multiprobe setup will be applied, enabling and facilitating direct and fast classification, modification as well as characterization procedures. In this way, systematic studies focusing on critical process parameter of scanning probe based lithographical processes on 2D materials will become feasible allowing to gain a deeper knowledge on the relevant physicochemical processes.

二维（2D）材料在过去几年中引起了广泛关注，因为这些材料在分离时呈现出独特的性质。因此，人们对将 2D 材料的固有特性应用于不同类型的新颖应用的兴趣不断增加。到目前为止，大多数采用 2D 材料的原型器件都是通过实施基于抗蚀剂的湿化学光刻技术来制造的。然而，这些基于抗蚀剂的工艺通常会留下大量残留物，这些残留物会污染二维材料并导致其优异和所需性能的显着恶化。因此，开发可靠的无抗蚀剂光刻工艺对于充分发挥基于 2D 材料的器件的性能潜力至关重要。实现 2D 材料无抗蚀剂光刻处理的一种有前途的方法是基于扫描探针方法，该方法能够以纳米级空间分辨率诱导材料的局部修饰。然而，到目前为止，对二维材料上基于扫描探针的光刻工艺的深入研究仍然有限，甚至无法进行。本项目旨在诱导和评估选定的二维材料上基于扫描探针的光刻工艺。为了实现这一目标，将应用定制的机器人多探针设置，从而实现并促进直接和快速的分类、修改以及表征程序。通过这种方式，专注于二维材料上基于扫描探针的光刻工艺的关键工艺参数的系统研究将变得可行，从而获得对相关物理化学过程的更深入的了解。

项目成果

期刊论文数量（3）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Pattern fabrication on graphene via dual probe local anodic oxidation

通过双探针局部阳极氧化在石墨烯上制造图案

DOI：
10.1109/nmdc.2017.8350498
发表时间：
2017
期刊：
2017 IEEE 12th Nanotechnology Materials and Devices Conference (NMDC)
影响因子：
0
作者：
S. A. Garnica Barragan; S. Zimmermann;S. Fatikow
通讯作者：
S. Fatikow

Automatic Micro-Robotic Identification and Electrical Characterization of Graphene

石墨烯的自动微型机器人识别和电学表征

DOI：
10.3390/mi10120870
发表时间：
2019
期刊：
Micromachines
影响因子：
3.4
作者：
Knaust; M.;Garnica Barragan; S.A.;Fatikow; S.
通讯作者：
S.

A laterally sensitive colloidal probe for accurately measuring nanoscale adhesion of textured surfaces

横向敏感胶体探针，用于精确测量纹理表面的纳米级粘附力

DOI：
10.1007/s12274-018-2228-0
发表时间：
2018-10-29
期刊：
Nano Research
影响因子：
9.9
作者：
S. Zimmermann;Waldemar Klauser;James L Mead;Shiliang Wang;Han Huang;S. Fatikow
通讯作者：
S. Fatikow