半導体微小機械共振器中のモード間結合効果の解明と超高感度テラヘルツ波検出への応用

阐明半导体微机械谐振器中的模间耦合效应及其在超灵敏太赫兹波检测中的应用

• 批准号: 21K04151
• 负责人: 張 亜
• 金额: $ 2.66万
• 依托单位: Tokyo University of Agriculture and Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2021
• 资助国家: 日本
• 起止时间: 2021-04-01 至 2024-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21K04151/
• 关键词: MEMS resonantor; nonlinearity; internal mode coupling; MEMS sensor; terahertz sensor; nonlinear dynamics; テラヘルツ; MEMS共振器; モード間結合; 非線形

The objective of this study is to clarify the mode coupling effect in MEMS beam resonators and explore its possible application in high sensitivity terahertz sensing. In the research of this year, we continued investigating the physical origin of the mode coupling effect by measuring the thermally modulated mode coupling strength.The mode coupling strength is determined by the resonance frequency shift when the coupled high frequency mode is excited simultaneously with the lower mode. As an input heat is applied to the MEMS beam, the MEMS beam is heated up to the buckling condition, which changes the mode coupling strength, as well as the mechanical nonlinearity of the MEMS beam. We have found that the mode coupling strength change has a very similar trend with the mechanical nonlinearity, indicating that these two effects may have the same origin. In addition, we have demonstrated that the mechanical nonlinearity mainly comes from the extended beam length during the mechanical oscillation, and can be controlled by the internal strain in the beam. This has been verified by inputting heat or introducing lattice mismatch in the MEMS beam. These results are very useful for understanding the fundamental physics in MEMS beam resonators, and hence are useful for designing highly sensitive MEMS detectors.

本研究的目的是阐明 MEMS 梁谐振器中的模式耦合效应，并探索其在高灵敏度太赫兹传感中的可能应用。在今年的研究中，我们通过测量热调制模式耦合强度，继续研究模式耦合效应的物理根源。模式耦合强度是由耦合高频模式与低频模式同时激励时的谐振频移决定的。模式。当输入热量施加到 MEMS 梁时，MEMS 梁被加热到屈曲条件，这会改变模式耦合强度以及 MEMS 梁的机械非线性。我们发现模式耦合强度的变化与机械非线性具有非常相似的趋势，表明这两种效应可能具有相同的根源。此外，我们还证明了机械非线性主要来自于机械振动过程中梁长度的延伸，并且可以通过梁中的内应变来控制。这已通过在 MEMS 梁中输入热量或引入晶格失配得到验证。这些结果对于理解 MEMS 梁谐振器的基本物理原理非常有用，因此对于设计高灵敏度 MEMS 探测器非常有用。

项目成果

振動解析装置，及び振動解析方法

振动分析装置及振动分析方法

• 发表时间: 2021

Beijing University of Technology/Shanghai Inst. of Mic. and Inf. Tech.(中国)

北京工业大学/上海交通大学

Two-dimensional measurement of resonance in MEMS resonators using stroboscopic differential interference contrast microscopy

使用频闪微分干涉显微镜对 MEMS 谐振器中的谐振进行二维测量

• DOI: 10.1364/oe.460769
• 发表时间: 2022
• 期刊: Optics Express
• 影响因子: 3.8
• 作者: Iimori Mirai;Zhang Ya
• 通讯作者: Zhang Ya

Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators

GaAs 双钳位 MEMS 梁谐振器中机械非线性的热调谐

• DOI: 10.1063/5.0065271
• 发表时间: 2021
• 期刊: Applied Physics Letters
• 影响因子: 4
• 作者: Zhang Ya;Yoshioka Yuri;Iimori Mirai;Qiu Boqi;Liu Xin;Hirakawa Kazuhiko
• 通讯作者: Hirakawa Kazuhiko

Terahertz MEMS Bolometers With Enhanced Thermal Sensitivity By Phononic Crystal Structures

通过声子晶体结构增强热灵敏度的太赫兹 MEMS 辐射热测量计

• 发表时间: 2021
• 作者: M. Sometani;H. Hirai;M. Okamoto;T. Hatakeyama;S. Harada;張 亜
• 通讯作者: 張 亜