Thin film sensors on 3D freeforms suitable for mechatronic systems - 3DSense

适用于机电系统的 3D 自由曲面薄膜传感器 - 3DSense

• 批准号: 283737812
• 负责人: Professor Dr. Günter Bräuer
• 金额: --
• 依托单位: Institut für Oberflächentechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2016
• 资助国家: 德国
• 起止时间: 2015-12-31 至 2018-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/283737812?language=en
• 关键词: Thin; film; sensors; 3D; freeforms

Novel mechatronic systems to be used in the fields of robotics, medical instruments, intelligent production and test equipment can be realized if sensors are available that can be placed on 3D shapes with the broadest design freedom. However, on the one hand the placement of miniaturized sensors that can be densely packed as sensor arrays by heterogeneous integration methods like manual or semi-automated assembly is not very accurate and reproducible. On the other hand, methods for 3D coating with thin film sensor material and for micro structuring 3D shapes are lacking. It is therefore goal of this project to investigate and develop a new type of flexible skins for conformal application as key element of novel mechatronic systems. These skins comprise integrated highly sensitive piezoresistive diamond-like-carbon sensors on 3D convertor structure arrays. For the success of this project supplementing research elements along the knowledge value chain from thin film materials over micro structures and sensors to demonstrators will be addressed by the participating institutions. Substrates with 3D-shaped mechanical converter structures in polymer and metal foils have to be designed. Conformal coating with 3D sensor thin films by plasma assisted chemical vapor deposition (PACVD) and novel reactive high power impulse magnetron sputtering (HIPIMS) will be investigated. Since lithographic techniques are limited to planar processing and fail to provide good definition of the micro structures of the extremely resistant diamond-like-carbon films, femtosecond laser processes shall be developed and applied for the 3D micro structuring of the sensor elements. The usefulness of these techniques will be demonstrated first by incorporating these novel sensors in a planar membrane pressure sensor. In a second step the sensors shall be incorporated also into a 3D smart skin sensor array. It shall be capable to sense, measure, and localize any contact with an external body. The project will benefit from the unique combination of expertise, including coatings and thin films (IOT-Institut für Oberflächentechnik at TU Braunschweig) and micro structuring and micro systems (IMT-Institut für Mikrotechnik at TU Braunschweig). The project can further benefit from previous experiences of joint research of the two applicants in the field of 2D sensor Systems.

如果可以在具有最广泛的设计自由的3D形状上放置，则可以在机器人技术，医疗仪器，智能生产和测试设备领域中使用新颖的机电系统系统。但是，一方面，通过异质整合方法（如手动或半自动化组件）的异质整合方法，可以将微型传感器的放置作为传感器阵列填充，这不是很准确且可重现。另一方面，缺乏使用薄膜传感器材料和微型结构3D形状的3D涂层的方法。因此，该项目的目标是调查和开发一种新型的灵活皮肤，以作为新型机电系统的关键要素作为保形应用。这些皮肤包括3D转换器结构阵列上的集成高度敏感的压电性钻石样碳传感器。为了使该项目的成功补充了沿着知识价值链的研究要素，从薄膜材料到微型结构和传感器到示威者，参与机构将解决。必须设计具有3D形机械转换器结构的底物和金属箔中的底物。通过血浆辅助化学蒸气沉积（PACVD）和新型的反应性高功率脉冲型磁控溅射（HIPIMS），与3D传感器薄膜结合涂层（HIPIMS）。由于光刻技术仅限于平面处理，并且无法对极具抵抗力的钻石样碳膜的微结构提供良好的定义，因此应开发并应用飞秒激光过程，并应用于传感器元素的3D微结构。这些技术的有用性将首先通过在平面膜压力传感器中增加这些新型传感器来证明。在第二步中，传感器也应将其合并到3D智能皮肤传感器阵列中。它应能够感知，测量和定位与外体的任何接触。该项目将受益于专业知识的独特组合，包括涂料和薄膜（Tu Braunschweig的IotinstitutFürOberflächentechnik）和微观结构和微型系统（Imt-InstitutfürMikrotechniktu Braunschweig at Tu Braunschweig）。该项目可以从2D传感器系统领域的两个应用程序的联合研究经验中进一步受益。

项目成果

Material structure and piezoresistive properties of niobium containing diamond-like-carbon films

含铌类金刚石薄膜的材料结构及压阻性能

• DOI: 10.1016/j.surfcoat.2018.10.008
• 发表时间: 2019
• 期刊: Surface & Coatings Technology
• 影响因子: 5.4
• 作者: M. Grein;R. Bandorf;K. Schiffmann;G. Bräuer
• 通讯作者: G. Bräuer

Femtosecond laser-contoured micro-strain gages

• DOI: 10.1016/j.mee.2019.05.002
• 发表时间: 2019-06-01
• 期刊: MICROELECTRONIC ENGINEERING
• 影响因子: 2.3
• 作者: von der Heide, Chresten;Grein, Maria;Dietzel, Andreas
• 通讯作者: Dietzel, Andreas

Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser.

使用脉冲飞秒激光从易受影响的聚合物基底上选择性烧蚀金属薄膜的方法

• DOI: 10.1364/oe.391084
• 发表时间: 2020
• 期刊: Optics express
• 影响因子: 3.8
• 作者: C. von der Heide;M. Grein;A. Dietzel
• 通讯作者: A. Dietzel

Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges

• DOI: 10.3390/coatings9070417
• 发表时间: 2019-06
• 期刊: Coatings
• 影响因子: 3.4
• 作者: M. Grein;J. Gerstenberg;Chresten von der Heide;R. Bandorf;G. Bräuer;A. Dietzel