Thin film sensors on 3D freeforms suitable for mechatronic systems - 3DSense

适用于机电系统的 3D 自由曲面薄膜传感器 - 3DSense

基本信息

批准号：
283737812
负责人：
Professor Dr. Günter Bräuer
金额：
--
依托单位：
Institut für Oberflächentechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2016
资助国家：
德国
起止时间：
2015-12-31 至 2018-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/283737812?language=en
关键词：
Thin film sensors 3D freeforms

项目摘要

Novel mechatronic systems to be used in the fields of robotics, medical instruments, intelligent production and test equipment can be realized if sensors are available that can be placed on 3D shapes with the broadest design freedom. However, on the one hand the placement of miniaturized sensors that can be densely packed as sensor arrays by heterogeneous integration methods like manual or semi-automated assembly is not very accurate and reproducible. On the other hand, methods for 3D coating with thin film sensor material and for micro structuring 3D shapes are lacking. It is therefore goal of this project to investigate and develop a new type of flexible skins for conformal application as key element of novel mechatronic systems. These skins comprise integrated highly sensitive piezoresistive diamond-like-carbon sensors on 3D convertor structure arrays. For the success of this project supplementing research elements along the knowledge value chain from thin film materials over micro structures and sensors to demonstrators will be addressed by the participating institutions. Substrates with 3D-shaped mechanical converter structures in polymer and metal foils have to be designed. Conformal coating with 3D sensor thin films by plasma assisted chemical vapor deposition (PACVD) and novel reactive high power impulse magnetron sputtering (HIPIMS) will be investigated. Since lithographic techniques are limited to planar processing and fail to provide good definition of the micro structures of the extremely resistant diamond-like-carbon films, femtosecond laser processes shall be developed and applied for the 3D micro structuring of the sensor elements. The usefulness of these techniques will be demonstrated first by incorporating these novel sensors in a planar membrane pressure sensor. In a second step the sensors shall be incorporated also into a 3D smart skin sensor array. It shall be capable to sense, measure, and localize any contact with an external body. The project will benefit from the unique combination of expertise, including coatings and thin films (IOT-Institut für Oberflächentechnik at TU Braunschweig) and micro structuring and micro systems (IMT-Institut für Mikrotechnik at TU Braunschweig). The project can further benefit from previous experiences of joint research of the two applicants in the field of 2D sensor Systems.

如果传感器能够以最广泛的设计自由度放置在 3D 形状上，则可以实现用于机器人、医疗器械、智能生产和测试设备领域的新型机电一体化系统。然而，一方面，小型化的放置。通过手动或半自动组装等异构集成方法可以密集封装为传感器阵列的传感器不太准确且可重复性差；另一方面，薄膜传感器材料的 3D 涂层和微结构化方法。因此，该项目的目标是研究和开发一种新型柔性蒙皮，作为新型机电系统的关键元件，这些蒙皮在 3D 转换器结构上包含集成的高灵敏度压阻类金刚石碳传感器。为了使该项目取得成功，参与机构将解决从薄膜材料到微结构和传感器到演示器的知识价值链的研究要素。由于光刻技术仅限于平面加工且无法实现，因此必须通过等离子体辅助化学气相沉积 (PACVD) 和新型反应性高功率脉冲磁控溅射 (HIPIMS) 来设计聚合物和金属箔的保形涂层。为了提供极其坚固的类金刚石碳薄膜的微观结构的良好定义，应开发飞秒激光工艺并将其应用于传感器元件的 3D 微观结构。这些技术的有用性将得到体现。首先通过将这些新型传感器集成到平面膜压力传感器中来进行演示，第二步将传感器集成到 3D 智能皮肤传感器阵列中，它应该能够感知、测量和定位与外部身体的任何接触。该项目将受益于独特的专业知识组合，包括涂层和薄膜（布伦瑞克工业大学的 IOT-Institut für Oberflächentechnik）以及微结构和微系统（IMT-Institut für该项目可以进一步受益于两位申请人之前在 2D 传感器系统领域的联合研究经验。

项目成果

期刊论文数量（4）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges

用于应变计的各种基材上的含铌 DLC 涂层

DOI：
10.3390/coatings9070417
发表时间：
2019-06-29
期刊：
Coatings
影响因子：
3.4
作者：
M. Grein;J. Gerstenberg;Chresten von der Heide;R. B;orf;orf;G. Bräuer;A. Dietzel
通讯作者：
A. Dietzel

Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser.

使用脉冲飞秒激光从易受影响的聚合物基底上选择性烧蚀金属薄膜的方法