Collaborative Research: FuSe:Substrate-inverted Multi-Material Integration Technology

合作研究:FuSe:衬底倒置多材料集成技术

基本信息

  • 批准号:
    2328839
  • 负责人:
  • 金额:
    $ 128万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Continuing Grant
  • 财政年份:
    2023
  • 资助国家:
    美国
  • 起止时间:
    2023-11-01 至 2026-10-31
  • 项目状态:
    未结题

项目摘要

Heterogeneous integration of new materials promises to significantly expand the range of capabilities accessible by silicon photonic integrated circuits (PICs). However, classical integration protocols require custom deep etching through the top layers to access the photonic devices underneath, and thus face severe limitations in integration capacity, density, and process complexity. This program will explore co-design of new materials, integration processes, device architectures, and packaging solutions to realize a transformative universal heterogeneous integration platform: Substrate-inverted Multi-Material Integration Technology (SuMMIT). Upon success, the SuMMIT platform will significantly expand and expedite heterogeneous photonic integration of new materials—a key driving force for PIC technology advances. The program will also strengthen academia-industry partnership and workforce development through development of both online and in-person photonics training programs.The SuMMIT integration scheme leverages advanced wafer-scale 3-D packaging technologies such as through-Si vias and direct bond interconnects to enable seamless integration of materials traditionally considered incompatible with complementary metal-oxide semiconductor processing. Another innovative aspect of the proposed scheme is the use of through-Si vias to establish a bi-facial electrical and optical interconnect configuration, which offers much higher interconnect density and improved electrical performance such as latency and power consumption as compared to peripheral wire-bonding. Furthermore, the SuMMIT platform opens up a plethora of design concepts creatively re-purposing existing components and structures in industry-standard PICs towards facilitating heterogeneous integration. The program’s focus on building on standard PIC processes and structures with minimal customization facilitates industry adoption of the innovations and their integration into the existing semiconductor manufacturing ecosystem.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.
新材料的异质整合有望显着扩大硅光子综合电路(图片)可访问的功能范围。但是,经典的集成协议需要在顶层进行自定义的深层蚀刻,才能访问下面的光子设备,从而面临着集成能力,密度和过程复杂性的严重限制。该计划将探讨新材料,集成过程,设备体系结构和包装解决方案的共同设计,以实现一个变革性的通用异质集成平台:融合基材的多物质集成技术(Summit)。成功后,峰会平台将大大扩展和加快新材料的异质光子整合,这是PIC技术进步的关键驱动力。该计划还将通过开发在线和面对面的光子学培训计划来加强学术界的伙伴关系和劳动力发展。峰会集成计划利用了先进的赌注尺度3-D包装技术,例如通过SI VIAS和直接键合连接互连,以实现与完整的金属氧化物的无缝集成的材料,以实现无效的集成。拟议方案的另一个创新方面是使用通过SI VIA来建立双种族的电气和光学互连配置,该配置提供了更高的互连密度和改善的电性能,例如与周围线束缚相比,延迟和功率消耗。此外,Summit平台为行业标准图片中的现有组件和结构创造性地打开了许多设计概念,以支持异质整合。该计划的重点是建立标准图片流程和结构,其最小的定制设施行业采用了创新及其在现有的半导体制造生态系统中的整合。该奖项反映了NSF的法定任务,并被认为是通过基金会的知识分子和更广泛影响的审查标准来通过评估来通过评估来获得的支持。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

暂无数据

数据更新时间:2024-06-01

Juejun Hu其他文献

Performance Optimization Strategies for Nanophotonic Digital Fourier Transform Spectrometers
纳米光子数字傅里叶变换光谱仪的性能优化策略
Photonic Tensor Core with Photonic Compute-in-Memory
具有光子内存计算功能的光子张量核心
A substrate-blind platform for photonic integration
用于光子集成的盲基板平台
  • DOI:
    10.1117/2.1201410.005643
    10.1117/2.1201410.005643
  • 发表时间:
    2014
    2014
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Juejun Hu
    Juejun Hu
  • 通讯作者:
    Juejun Hu
    Juejun Hu
Invited) Mechanically Flexible Integrated Photonic Systems for Sensing and Communications
特邀)用于传感和通信的机械柔性集成光子系统
  • DOI:
  • 发表时间:
    2017
    2017
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Lan Li;Hongtao Lin;Jérôme Michon;S. Geiger;Junying Li;Hanyu Zheng;Yizhong Huang;A. Yadav;K. Richardson;T. Gu;Juejun Hu
    Lan Li;Hongtao Lin;Jérôme Michon;S. Geiger;Junying Li;Hanyu Zheng;Yizhong Huang;A. Yadav;K. Richardson;T. Gu;Juejun Hu
  • 通讯作者:
    Juejun Hu
    Juejun Hu
Integration of Free-Form Micro-Optics with PICs for Sensing, Packaging, and Optical Manipulation
自由曲面微光学器件与 PIC 的集成,用于传感、封装和光学操作
共 47 条
  • 1
  • 2
  • 3
  • 4
  • 5
  • 6
  • 10
前往

Juejun Hu的其他基金

Collaborative Research: FuSe: High-throughput Discovery of Phase Change Materials for Co-designed Electronic and Optical Computational Devices (PHACEO)
合作研究:FuSe:用于共同设计的电子和光学计算设备的相变材料的高通量发现(PHACEO)
  • 批准号:
    2329088
    2329088
  • 财政年份:
    2023
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
Collaborative Research: Combinatorial solution processing of optical phase change materials
合作研究:光学相变材料的组合溶液加工
  • 批准号:
    2225968
    2225968
  • 财政年份:
    2022
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
PFI-RP: A high-performance, low-cost chip-scale platform for medical imaging
PFI-RP:用于医学成像的高性能、低成本芯片级平台
  • 批准号:
    2122581
    2122581
  • 财政年份:
    2021
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
ASCENT: PROWESS: Phase-change Reconfigurable Optical WavEfront Synthesis System
ASCENT:PROWESS:相变可重构光波前合成系统
  • 批准号:
    2132929
    2132929
  • 财政年份:
    2021
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
Collaborative Research: Tellurene mid-infrared integrated photonics
合作研究:碲烯中红外集成光子学
  • 批准号:
    2023987
    2023987
  • 财政年份:
    2020
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
I-Corps: 6Sensing: Chip-scale Raman sensors
I-Corps:6Sensing:芯片级拉曼传感器
  • 批准号:
    1851293
    1851293
  • 财政年份:
    2018
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
Collaborative Research: Conformal and robust integrated infrared spectroscopic sensors
合作研究:共形且坚固的集成红外光谱传感器
  • 批准号:
    1709212
    1709212
  • 财政年份:
    2017
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
CAREER: Glass-Based Fexible Integrated Photonic Devices
职业:玻璃基柔性集成光子器件
  • 批准号:
    1453218
    1453218
  • 财政年份:
    2015
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant
Collaborative Research: Thin-Film Chalcogenide Glass Materials for High-Quality Integrated Photonics
合作研究:用于高质量集成光子学的薄膜硫系玻璃材料
  • 批准号:
    1506605
    1506605
  • 财政年份:
    2015
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant
Workshop -- Support to Students to Attend IEEE Photonics Society Summer Topical Conferences, Montreal, July 14-16, 2014
研讨会——支持学生参加 IEEE 光子学协会夏季专题会议,蒙特利尔,2014 年 7 月 14 日至 16 日
  • 批准号:
    1439933
    1439933
  • 财政年份:
    2014
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Standard Grant
    Standard Grant

相似国自然基金

支持二维毫米波波束扫描的微波/毫米波高集成度天线研究
  • 批准号:
    62371263
  • 批准年份:
    2023
  • 资助金额:
    52 万元
  • 项目类别:
    面上项目
腙的Heck/脱氮气重排串联反应研究
  • 批准号:
    22301211
  • 批准年份:
    2023
  • 资助金额:
    30 万元
  • 项目类别:
    青年科学基金项目
水系锌离子电池协同性能调控及枝晶抑制机理研究
  • 批准号:
    52364038
  • 批准年份:
    2023
  • 资助金额:
    33 万元
  • 项目类别:
    地区科学基金项目
基于人类血清素神经元报告系统研究TSPYL1突变对婴儿猝死综合征的致病作用及机制
  • 批准号:
    82371176
  • 批准年份:
    2023
  • 资助金额:
    49 万元
  • 项目类别:
    面上项目
FOXO3 m6A甲基化修饰诱导滋养细胞衰老效应在补肾法治疗自然流产中的机制研究
  • 批准号:
    82305286
  • 批准年份:
    2023
  • 资助金额:
    30 万元
  • 项目类别:
    青年科学基金项目

相似海外基金

Collaborative Research: FuSe: R3AP: Retunable, Reconfigurable, Racetrack-Memory Acceleration Platform
合作研究:FuSe:R3AP:可重调、可重新配置、赛道内存加速平台
  • 批准号:
    2328975
    2328975
  • 财政年份:
    2024
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant
Collaborative Research: FuSe: R3AP: Retunable, Reconfigurable, Racetrack-Memory Acceleration Platform
合作研究:FuSe:R3AP:可重调、可重新配置、赛道内存加速平台
  • 批准号:
    2328973
    2328973
  • 财政年份:
    2024
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant
Collaborative Research: FuSe: R3AP: Retunable, Reconfigurable, Racetrack-Memory Acceleration Platform
合作研究:FuSe:R3AP:可重调、可重新配置、赛道内存加速平台
  • 批准号:
    2328972
    2328972
  • 财政年份:
    2024
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant
Collaborative Research: FuSe: R3AP: Retunable, Reconfigurable, Racetrack-Memory Acceleration Platform
合作研究:FuSe:R3AP:可重调、可重新配置、赛道内存加速平台
  • 批准号:
    2328974
    2328974
  • 财政年份:
    2024
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant
Collaborative Research: FuSe: Metaoptics-Enhanced Vertical Integration for Versatile In-Sensor Machine Vision
合作研究:FuSe:Metaoptics 增强型垂直集成,实现多功能传感器内机器视觉
  • 批准号:
    2416375
    2416375
  • 财政年份:
    2023
  • 资助金额:
    $ 128万
    $ 128万
  • 项目类别:
    Continuing Grant
    Continuing Grant