STTR Phase I: Snapshot, on-machine metrology system for high-precision optical manufacturing

STTR 第一阶段：用于高精度光学制造的快照机上测量系统

• 批准号: 2322208
• 负责人: Rongguang Liang
• 金额: $ 27.45万
• 依托单位: LIGHT RESEARCH INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2024
• 资助国家: 美国
• 起止时间: 2024-10-01 至 2025-09-30
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2322208&HistoricalAwards=false
• 关键词: STTR; Phase; Snapshot; machine; metrology

The broader/commercial impact of this Small Business Technology Transfer (STTR) Phase I project advances precision manufacturing. The on-machine metrology system will have a transformative effect on highly efficient and precise optical manufacturing, additive manufacturing, and precision machining. These industries currently face a shared technical challenge: the lack of real-time quality control during fabrication. The on-machine metrology tool's real-time quality control capabilities will not only drive efficiency in high-precision manufacturing but also contribute to reduced manufacturing costs and enhanced product quality. Overall, the project's anticipated outcomes include an efficient high throughput manufacturing process with on-machine metrology, the development of a compact, snapshot, multi-wavelength on-machine metrology system, and the establishment of a next-generation innovation and entrepreneurship training program. This STTR project seeks to develop a compact, snapshot, dual-mode, multi-wavelength interferometric system for in situ metrology in high precision manufacturing. The lack of real-time quality control during fabrication is a critical hurdle, leading to delays and manufacturing errors. This system integrates unique techniques to overcome this challenge and enhance throughput and accuracy. The technology utilizes a polarization-based, multi-wavelength, snapshot technique providing real-time measurements of machined surfaces with minimal environmental impacts. By offering instant feedback on surface quality, reducing iterations for diamond tool centering, and improving throughput and accuracy, the system becomes the smallest interferometric system suitable for integration into existing equipment for in situ metrology. The project's goal is to develop a market-ready, on-machine metrology system through prototyping, software development, and performance validation. This real-time, in-situ metrology process is estimated to achieve efficiency improvements of 30% or more in diamond-tool alignment and 50% or more in surface metrology. Successful development and commercialization of this system will hold significant intellectual merit, overcoming a critical hurdle in high-precision manufacturing and enabling real-time quality control.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这种小型企业技术转移（STTR）I阶段项目的更广泛/商业影响的精确制造。机上计量系统将对高效且精确的光学制造，添加剂制造和精确加工产生变革性的影响。这些行业目前面临共同的技术挑战：制造过程中缺乏实时质量控制。 机上计量工具的实时质量控制功能不仅会推动高精度制造业的效率，而且还有助于降低制造成本和提高产品质量。总体而言，该项目的预期成果包括具有货舱计量学，紧凑型，快照，多波长的机器计量系统的高效高通量制造过程，以及建立下一代创新和创业培训计划。这个STTR项目旨在开发紧凑的，快照，双模式，多波长干涉系统，用于高精度制造中的原位计量学。制造过程中缺乏实时质量控制是一个关键障碍，导致延迟和制造错误。该系统集成了独特的技术来克服这一挑战并增强吞吐量和准确性。该技术利用基于极化的多波长快照技术，可为加工表面的实时测量带来最小的环境影响。通过提供有关表面质量的即时反馈，减少钻石工具中心的迭代以及提高吞吐量和准确性，该系统成为最小的干涉系统，适合于现有的设备集成现有设备，以用于原位计量学。该项目的目标是通过原型制作，软件开发和性能验证来开发一个准备市场的机上计量系统。估计这一实时的原位计量过程可以在钻石工具对齐中实现30％或更多的效率提高，而表面计量学的效率提高了50％或更多。该系统的成功开发和商业化将具有重要的智力优势，克服高精度制造业的关键障碍，并实现实时质量控制。该奖项反映了NSF的法定任务，并被认为是值得通过基金会的智力优点评估来支持的，并具有更广泛的影响标准。