Directed Self-Assembly of Block Copolymer Thin Films into Useful Organized Patterns for Microelectronics and Nanofabrication.

将嵌段共聚物薄膜定向自组装成微电子和纳米制造有用的组织图案。

• 批准号: 2011254
• 负责人: Michael Arnold
• 金额: $ 34.59万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2011254&HistoricalAwards=false
• 关键词: Directed; Self; Assembly; Block; Copolymer

This grant supports research that creates new understanding and capabilities regarding a manufacturing process enabling the fabrication of patterns and features on surfaces that are extremely small -- only a few billionths of a meter (a few nanometers) in extent. Precision fabrication at these lengths is driving manufacturing advances in areas of national importance including microelectronics, optical materials, sensors, chemical purification membranes, and quantum materials. This award supports fundamental research on block copolymer-based nanofabrication. When two different conventional polymers that do not “like” each other are mixed, the two polymers separate – like oil and water. However, when these two polymers are bonded to each other – to form a block copolymer – macroscopic separation is inhibited, and nanoscale segregation occurs instead. Features smaller than hundred (100), ten (10), and even five (5) nanometers are generated automatically, that cannot be easily created otherwise. This project focuses on spatially directing this nanoscale segregation on surfaces so that rationally organized and useful (as opposed to random) patterns can be formed. An example is nanopatterning the surfaces of semiconductors for computer chips so that they perform faster, are more energy efficient, and can be more complex. The research integrates advanced concepts from materials science and engineering, chemistry, and nanomanufacturing. The interdisciplinary research helps widen the involvement of diverse groups in fundamental research and constructively influences science and engineering education.This research specifically addresses the challenge of registering and directing the self-assembly of vertically oriented block copolymer lamellar domains into rationally controlled sub-lithographic patterns through the exploitation of boundary-directed epitaxy. Boundary-directed epitaxy uses the abrupt chemical contrast that is inherent at spatial boundaries between regions on a substrate with different surface composition to direct the registration, alignment, and self-assembly of block copolymers. The advantages are substantial: the boundaries can be defined between features that are planar and relatively large – circumventing the need for trenches or high-resolution chemical patterns. The mechanisms that drive self-assembly are highly unexplored. The project determines the chemical composition / preferentiality window for boundary-directed epitaxy; quantifies the impact of boundary-roughness on assembly; characterizes how defects arise; and understands how the assembly evolves over time. The project studies and demonstrates boundary-directed epitaxy for nanofabrication, materials synthesis, and nanolithography; investigates assembly on templates with curved boundaries and complex shapes – essential for many applications; and, broadens the library of template materials that can be exploited to advance the generality of the phenomenon.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项赠款支持有关制造过程创造新的理解和能力的研究，从而在非常小的表面上实现了图案和特征的结构 - 只有几十亿分之一的范围（几纳米）。在这些长度上的精确制造正在推动国家重要性领域的制造业进步，包括微电子，光学材料，传感器，化学纯化机制和量子材料。该奖项支持基于块共聚物的纳米制作的基本研究。当两种不“喜欢”的不同常规聚合物混合在一起时，两个聚合物分开 - 例如油和水。但是，当这两种聚合物相互键合时 - 形成块共聚物 - 宏观分离就会被抑制，而纳米级隔离会发生。自动生成小于一百（100），十（10），十（10），甚至五（5）纳米的功能，否则就无法轻易创建。该项目着重于在空间上引导这种纳米级隔离在表面上，因此可以形成合理组织和有用的（与随机）模式。一个例子是纳米图表为计算机芯片的半导体表面表面，以使它们的性能更快，更节能，并且可能更复杂。该研究将材料科学和工程，化学和纳米制造的高级概念整合在一起。跨学科研究有助于扩大潜水员群体参与基本研究，并建设性地影响科学和工程教育。这项研究专门解决了通过通过剥削的边界偏置的剥削来登记和将垂直定向的块共聚物层状结构域自我组装到合理控制的子层学模式中的挑战。边界指导的外在使用使用不同表面组成区域的区域之间的空间边界的突然化学对比，以指导块共聚物的注册，比对和自组装。优点是实质性的：可以在平面和相对较大的特征之间定义边界 - 规避对沟渠或高分辨率化学模式的需求。驱动自组装的机制非常出乎意料。该项目确定了边界定向发作的化学成分 /优惠性窗口；量化边界改进对组件的影响；人物;并了解组件如何随着时间的流逝而演变。该项目研究并证明了纳米化，材料合成和纳米片摄影的边界指导发作；研究具有弯曲边界和复杂形状的模板上的组装 - 对于许多应用至关重要；而且，扩大了可以探索的模板材料库，以提高现象的一般性。该奖项反映了NSF的法定任务，并使用基金会的知识分子优点和更广泛的影响评估标准被认为是珍贵的支持。

项目成果

Boundary-Directed Epitaxy of Block Copolymers Toward Sub-10 nm Fabrication

面向亚 10 nm 制造的嵌段共聚物的边界定向外延

• DOI: 10.1149/11101.0011ecst
• 发表时间: 2023
• 期刊: ECS Transactions
• 作者: Su, Katherine Anna;Jacobberger, Robert;Stan, Liliana;Arnold, Michael Scott
• 通讯作者: Arnold, Michael Scott