Nanoscale Control over Surface Functionalization by Molecular Layer Deposition

通过分子层沉积对表面功能化进行纳米级控制

基本信息

批准号：
1904108
负责人：
Stacey Bent
金额：
$ 47.55万
依托单位：
Stanford University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2019
资助国家：
美国
起止时间：
2019-09-01 至 2024-04-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1904108&HistoricalAwards=false
关键词：
Nanoscale Control over Surface Functionalization

项目摘要

With support from the Macromolecular, Supramolecular and Nanochemistry (MSN) Program in the Division of Chemistry, Professor Stacey Bent and her research group at Stanford University are developing new chemistries for carrying out processes that deposit a molecular layer of material on a surface (molecular layer deposition (MLD)). These layers are nanometer-sized (one billionth of a meter) and contain organic molecules in a very thin film. Organic thin films on surfaces are important because they provide ways to tune the electronic, chemical and mechanical properties of materials, with applications ranging from nanoelectronics to biomedical devices to catalysis. The research program studies the fundamental process by which the layers are added to the surface as well as the resulting organic films. The fundamental understanding gained from this work helps introduce a new tool-kit for attaching thin films with useful and tunable properties to solid materials. The Bent group provides mentorship and training to graduate students and undergraduate researchers. The team hosts high school teachers in a diverse, multidisciplinary environment. STEM undergraduates have the opportunity to work in small, energy-related companies through a summer internship program that Professor Bent helped initiate.The project contributes new methods for the controlled synthesis of functional thin films at solid surfaces by expanding the MLD technique in two principal directions. The research explores ways in which solution-based approaches can inform new synthetic strategies for organic MLD with the use of nanometer-thick films of liquids at the surface. These films mimic solvent effects on surfaces. The team expands MLD approaches to create novel, hybrid surface assemblies, including hybrid materials based on metal sulfides and metal nitrides. The film synthesis is closely integrated with characterization studies that elucidate MLD mechanisms and both microscopic and macroscopic film properties. Experimental and theoretical approaches are undertaken to uncover information such as the extent of reaction, film structure, the presence of long-range order, chain orientation, film stability, and optical and electrical properties in the interfacial assemblies. The studies aim to answer fundamental questions about growth mechanisms and the relationship between film structure and interface properties in MLD. Taken together, the research may lead to new approaches to create interfacial functionality for a wide range of systems.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

在化学系高分子、超分子和纳米化学 (MSN) 项目的支持下，史黛西·本特 (Stacey Bent) 教授和她在斯坦福大学的研究小组正在开发新的化学方法，用于在表面沉积分子层材料的过程（分子层）沉积（MLD））。这些层的尺寸为纳米（十亿分之一米），并且在非常薄的薄膜中包含有机分子。表面上的有机薄膜很重要，因为它们提供了调节材料的电子、化学和机械性能的方法，其应用范围从纳米电子学到生物医学设备再到催化。该研究项目研究了将层添加到表面的基本过程以及由此产生的有机薄膜。从这项工作中获得的基本理解有助于引入一种新的工具包，用于将具有有用且可调节特性的薄膜附着到固体材料上。本特小组为研究生和本科生研究人员提供指导和培训。该团队在多元化、多学科的环境中接待高中教师。 STEM 本科生有机会通过 Bent 教授发起的暑期实习计划在小型能源相关公司工作。该项目通过在两个主要方向扩展 MLD 技术，为固体表面功能薄膜的受控合成提供了新方法。该研究探索了基于溶液的方法如何通过在表面使用纳米厚的液体薄膜来为有机 MLD 的新合成策略提供信息。这些薄膜模拟溶剂对表面的影响。该团队扩展了 MLD 方法，以创建新颖的混合表面组件，包括基于金属硫化物和金属氮化物的混合材料。薄膜合成与表征研究紧密结合，阐明 MLD 机制以及微观和宏观薄膜特性。采用实验和理论方法来揭示信息，例如反应程度、薄膜结构、长程有序的存在、链取向、薄膜稳定性以及界面组件中的光学和电学特性。这些研究旨在回答有关 MLD 中生长机制以及薄膜结构和界面性质之间关系的基本问题。总而言之，这项研究可能会带来为各种系统创建界面功能的新方法。该奖项反映了 NSF 的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

期刊论文数量（7）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Bridging the Synthesis Gap: Ionic Liquids Enable Solvent-Mediated Reaction in Vapor-Phase Deposition

缩小合成差距：离子液体在气相沉积中实现溶剂介导的反应

DOI：
10.1021/acsnano.0c09329
发表时间：
2021
期刊：
ACS Nano
影响因子：
17.1
作者：
Shi, Jingwei;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Thermally Activated Reactions of Phenol at the Ge(100)-2 × 1 Surface

苯酚在 Ge(100)-2 × 1 表面的热激活反应

DOI：
10.1021/acs.jpcc.0c06314
发表时间：
2020
期刊：
The Journal of Physical Chemistry C
影响因子：
0
作者：
Shong, Bonggeun;Ansari, Abu Saad;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition

通过三前体分子层沉积生长的甲基丙烯酸甲酯基铝杂化薄膜

DOI：
10.1116/6.0001505
发表时间：
2022
期刊：
Journal of Vacuum Science & Technology A
影响因子：
2.9
作者：
Oyakhire, Solomon T.;Ablat, Hayrensa;Richey, Nathaniel E.;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Modulating the optoelectronic properties of hybrid Mo-thiolate thin films

调节混合硫醇钼薄膜的光电特性

DOI：
10.1116/6.0001378
发表时间：
2022
期刊：
Journal of Vacuum Science & Technology A
影响因子：
2.9
作者：
Shi, Jingwei;Zeng, Li;Nikzad, Shayla;Koshy, David M.;Asundi, Arun S.;MacIsaac, Callisto;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Molecular layer deposition of an Al-based hybrid resist for electron-beam and EUV lithography