Nanoscale Control over Surface Functionalization by Molecular Layer Deposition

通过分子层沉积对表面功能化进行纳米级控制

基本信息

批准号：
1904108
负责人：
Stacey Bent
金额：
$ 47.55万
依托单位：
Stanford University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2019
资助国家：
美国
起止时间：
2019-09-01 至 2024-04-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1904108&HistoricalAwards=false
关键词：
Nanoscale Control over Surface Functionalization

项目摘要

With support from the Macromolecular, Supramolecular and Nanochemistry (MSN) Program in the Division of Chemistry, Professor Stacey Bent and her research group at Stanford University are developing new chemistries for carrying out processes that deposit a molecular layer of material on a surface (molecular layer deposition (MLD)). These layers are nanometer-sized (one billionth of a meter) and contain organic molecules in a very thin film. Organic thin films on surfaces are important because they provide ways to tune the electronic, chemical and mechanical properties of materials, with applications ranging from nanoelectronics to biomedical devices to catalysis. The research program studies the fundamental process by which the layers are added to the surface as well as the resulting organic films. The fundamental understanding gained from this work helps introduce a new tool-kit for attaching thin films with useful and tunable properties to solid materials. The Bent group provides mentorship and training to graduate students and undergraduate researchers. The team hosts high school teachers in a diverse, multidisciplinary environment. STEM undergraduates have the opportunity to work in small, energy-related companies through a summer internship program that Professor Bent helped initiate.The project contributes new methods for the controlled synthesis of functional thin films at solid surfaces by expanding the MLD technique in two principal directions. The research explores ways in which solution-based approaches can inform new synthetic strategies for organic MLD with the use of nanometer-thick films of liquids at the surface. These films mimic solvent effects on surfaces. The team expands MLD approaches to create novel, hybrid surface assemblies, including hybrid materials based on metal sulfides and metal nitrides. The film synthesis is closely integrated with characterization studies that elucidate MLD mechanisms and both microscopic and macroscopic film properties. Experimental and theoretical approaches are undertaken to uncover information such as the extent of reaction, film structure, the presence of long-range order, chain orientation, film stability, and optical and electrical properties in the interfacial assemblies. The studies aim to answer fundamental questions about growth mechanisms and the relationship between film structure and interface properties in MLD. Taken together, the research may lead to new approaches to create interfacial functionality for a wide range of systems.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

在化学划分中的大分子，超分子和纳米化学（MSN）计划的支持下，Stacey Bent教授及其在斯坦福大学的研究小组正在开发新的化学作用，用于执行将分子层沉积在表面上的分子层的过程（分子层沉积（MLD））。这些层是纳米尺寸的（十亿米），并且在非常薄的膜中包含有机分子。表面上的有机薄膜很重要，因为它们提供了调整材料的电子，化学和机械性能的方法，其应用从纳米电子到生物医学设备到催化。研究计划研究了将层添加到表面以及所得的有机膜中的基本过程。从这项工作中获得的基本理解有助于引入一种新的工具套件，用于将薄膜附加具有有用且可调的特性的薄膜。 Bent Group为研究生和本科研究人员提供指导和培训。该团队在多样化的多学科环境中接待高中教师。 STEM本科生有机会通过Bent教授帮助启动的暑期实习计划在与能源相关的小型公司中工作。该项目通过在两个主要方向上扩展MLD技术，为在固体表面的功能性薄膜中受控合成新方法。该研究探讨了基于溶液的方法可以通过在表面上使用纳米厚的液体薄膜来为有机MLD的新合成策略提供信息。这些薄膜模仿对表面的溶剂作用。该团队扩展了MLD方法，以创建新型混合表面组件，包括基于金属硫化物和金属氮化物的混合材料。膜合成与阐明MLD机制以及显微镜和宏观膜特性的表征研究紧密融合。采用实验和理论方法来发现信息，例如反应，膜结构，远距离顺序的存在，链取向，膜稳定性以及界面组件中的光学和电气性能。该研究旨在回答有关增长机制以及MLD中膜结构与界面特性之间关系的基本问题。综上所述，这项研究可能会导致新的方法来创建各种系统的界面功能。该奖项反映了NSF的法定任务，并被认为是值得通过基金会的知识分子优点和更广泛的影响评估标准通过评估来支持的。

项目成果

期刊论文数量（7）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Bridging the Synthesis Gap: Ionic Liquids Enable Solvent-Mediated Reaction in Vapor-Phase Deposition

缩小合成差距：离子液体在气相沉积中实现溶剂介导的反应

DOI：
10.1021/acsnano.0c09329
发表时间：
2021
期刊：
ACS Nano
影响因子：
17.1
作者：
Shi, Jingwei;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Thermally Activated Reactions of Phenol at the Ge(100)-2 × 1 Surface

苯酚在 Ge(100)-2 × 1 表面的热激活反应

DOI：
10.1021/acs.jpcc.0c06314
发表时间：
2020
期刊：
The Journal of Physical Chemistry C
影响因子：
0
作者：
Shong, Bonggeun;Ansari, Abu Saad;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition

通过三前体分子层沉积生长的甲基丙烯酸甲酯基铝杂化薄膜

DOI：
10.1116/6.0001505
发表时间：
2022
期刊：
Journal of Vacuum Science & Technology A
影响因子：
2.9
作者：
Oyakhire, Solomon T.;Ablat, Hayrensa;Richey, Nathaniel E.;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Modulating the optoelectronic properties of hybrid Mo-thiolate thin films

调节混合硫醇钼薄膜的光电特性

DOI：
10.1116/6.0001378
发表时间：
2022
期刊：
Journal of Vacuum Science & Technology A
影响因子：
2.9
作者：
Shi, Jingwei;Zeng, Li;Nikzad, Shayla;Koshy, David M.;Asundi, Arun S.;MacIsaac, Callisto;Bent, Stacey F.
通讯作者：
Bent, Stacey F.

Molecular layer deposition of an Al-based hybrid resist for electron-beam and EUV lithography