MRI: Acquisition of a variable angle spectroscopic ellipsometer

MRI：获取可变角度光谱椭偏仪

基本信息

批准号：
1827904
负责人：
Wyatt Tenhaeff
金额：
$ 18.73万
依托单位：
University of Rochester
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2018
资助国家：
美国
起止时间：
2018-09-01 至 2020-08-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1827904&HistoricalAwards=false
关键词：
MRI Acquisition variable angle spectroscopic

项目摘要

The variable angle spectroscopic ellipsometer (VASE) to be acquired will provide unparalleled thin film characterization capabilities for a host of research projects in the Rochester, NY region. Examples of research projects include the fundamental study of thermophysical properties of polymer thin films deposited by a unique chemical vapor deposition technique, in situ characterization of responsive coatings in biomedical devices, comprehensive characterization of two-dimensional materials for photonic devices, and the study of laser-induced damage in optical coating materials for high power laser applications. Twelve research groups from the University of Rochester, Rochester Institute of Technology, and the Laboratory for Laser Energetics have been identified as users of the VASE tool. To further promote effective utilization of the VASE tool and make it widely accessible resource, it will be installed in a general user facility on the University of Rochester campus. Another key function of the VASE tool is to support student education to prepare them for potential careers in optics, semiconductors and photonics.The proposed spectroscopic ellipsometry will be utilized for thin film materials of varied optical properties. Mueller-matrix ellipsometry measures all 16 elements of the Mueller matrix, which is the most complete description of a medium's response to polarized light. This enables quantitative analysis of samples with complex structure, such as optically anisotropic and depolarizing samples, while retaining standard ellipsometry capabilities, which are sufficient for isotopic, non-depolarizing samples. The specific instrument to be acquired is the RC2 ellipsometer, with additional enhancements to maximize its versatility and to enable multidisciplinary research efforts. They include an auto-translating stage for mapping of patterned surfaces and/or to assess film uniformity, rotational stage to measure anisotropic samples at several angles relative to the incident polarization, liquid cell for dynamic measurements of hydrated (solvated) films, thermal stage to characterize film properties as a function of temperature, environmental cell to measure films in controlled vapor atmospheres, and an electrochemical cell for coupled in situ electrochemical device characterization. The large sample stage and flexible physical configuration of the RC2 ellipsometer will allow future development of custom in situ characterization capabilities, ensuring the broad utility of this instrument in research projects for many years to come.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

即将收购的可变角度光谱椭偏仪 (VASE) 将为纽约州罗切斯特地区的许多研究项目提供无与伦比的薄膜表征能力。研究项目的例子包括通过独特的化学气相沉积技术沉积的聚合物薄膜的热物理性质的基础研究、生物医学设备中响应涂层的原位表征、光子设备的二维材料的综合表征以及激光的研究高功率激光应用的光学镀膜材料中的诱发损伤。来自罗切斯特大学、罗切斯特理工学院和激光能量学实验室的 12 个研究小组已被确定为 VASE 工具的用户。为了进一步促进 VASE 工具的有效利用并使其资源可广泛访问，它将安装在罗切斯特大学校园的一般用户设施中。 VASE 工具的另一个关键功能是支持学生教育，为他们在光学、半导体和光子学领域的潜在职业做好准备。所提出的光谱椭偏仪将用于各种光学特性的薄膜材料。 Mueller 矩阵椭圆光度测量 Mueller 矩阵的所有 16 个元素，这是对介质对偏振光响应的最完整的描述。这使得能够对具有复杂结构的样品（例如光学各向异性和去偏光样品）进行定量分析，同时保留标准椭圆光度测量能力，这足以用于同位素、非去偏光样品。将购买的具体仪器是 RC2 椭偏仪，并进行了额外的增强，以最大限度地提高其多功能性并支持多学科研究工作。它们包括用于绘制图案表面和/或评估薄膜均匀性的自动平移台、用于在相对于入射偏振的多个角度测量各向异性样品的旋转台、用于动态测量水合（溶剂化）薄膜的液体池、用于动态测量水合（溶剂化）薄膜的热台将薄膜特性表征为温度的函数，在受控蒸气气氛中测量薄膜的环境电池，以及用于耦合原位电化学装置表征的电化学电池。 RC2 椭偏仪的大样本台和灵活的物理配置将允许未来定制原位表征功能的开发，确保该仪器在未来许多年的研究项目中得到广泛应用。该奖项反映了 NSF 的法定使命，并被认为是值得的通过使用基金会的智力优势和更广泛的影响审查标准进行评估来获得支持。