OP: MEMS-driven photonic metamaterials: dynamic wavefront tailoring with reconfigurable metasurfaces

OP：MEMS 驱动的光子超材料：具有可重构超表面的动态波前定制

• 批准号: 1810252
• 负责人: Xin Zhang
• 金额: $ 36.21万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2018
• 资助国家: 美国
• 起止时间: 2018-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1810252&HistoricalAwards=false
• 关键词: OP; MEMS; driven; photonic; metamaterials

Part A:This project aims to develop tunable metamaterials driven by integrated microelectromechanical system (MEMS) actuators for dynamic control of terahertz and infrared light. Photonic metamaterials have proven to be a powerful tool to manipulate light propagation. However, there is an existing challenge concerning the development of random access metamaterials with on-demand effective properties. In order to overcome this grand challenge, MEMS actuators will be integrated with metamaterial unit cells, enabling on-demand light manipulation. The physics of phase control, design of unit cells, micro-/nanofabrication, and system integration schemes will be investigated to realize metamaterial devices that can manipulate the wavefront of terahertz and infrared light as desired, enabling, for example, dynamic beam steering and tunable focusing. The metamaterial devices that will be developed are multifunctional, compact, and dynamically tunable, offering significant potential in comparison to conventional optical devices. The success of this project will boost the development of opto-electronic systems in areas such as spectroscopy, high-resolution imaging, and light detection and ranging (LiDAR), which are widely used in healthcare and national security and defense. This project provides a platform to educate young researchers, including women and underrepresented minorities, fostering their passion in fundamental optics and photonics research and applied engineering technologies.Part B:Metamaterials have revolutionized electromagnetism during the past decade resulting in myriad new phenomena including cloaking, negative refractive index, and tunable electromagnetic composites. The goal of this project is to develop dynamically reconfigurable metamaterials to manipulate the wavefront of terahertz and infrared light, which is enabled by integrating MEMS actuators in metamaterial unit cells. For efficient wavefront manipulation, the key is to achieve full-span phase coverage with constant amplitude in the response of metamaterial unit cells. However, the amplitude and phase response of the majority of metamaterial designs are bounded, making it challenging to achieve high-efficiency wavefront manipulation. In the proposed work, the coupling effect between the metamaterial layer and a ground plane or two layers of metamaterials will be studied to design structures that can modulate the phase response with little effect on the amplitude response, i.e. decoupling amplitude and phase modulation. Fabrication processes will be developed to construct metamaterial devices based on both surface and bulk micro-/nanomachining techniques. The integration of metamaterial unit cells and MEMS actuators will be investigated and optimized to make each unit cell accessible individually by employing advanced MEMS integration and packaging techniques including three-dimensional wire routing, through silicon vias (TSVs) and flip chip bonding. Finally, tunable metamaterial devices exhibiting multifunctionality will be demonstrated to manipulate terahertz and infrared light. This includes dynamic beam steering and focusing, which cannot be achieved with state-of-the-art techniques, for a variety of applications, such as spectroscopy, imaging, and LiDAR.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

A部分：该项目旨在开发由集成微机电系统（MEMS）执行器驱动的可调谐超材料，用于太赫兹和红外光的动态控制。光子超材料已被证明是操纵光传播的强大工具。然而，开发具有按需有效特性的随机存取超材料仍然存在挑战。为了克服这一巨大挑战，MEMS 执行器将与超材料单元集成，从而实现按需光操纵。将研究相位控制物理、单元设计、微/纳米制造和系统集成方案，以实现可以根据需要操纵太赫兹和红外光波前的超材料器件，例如实现动态光束转向和可调聚焦。将开发的超材料器件具有多功能、紧凑和动态可调的特点，与传统光学器件相比具有巨大的潜力。该项目的成功将促进光谱学、高分辨率成像、光探测和测距（LiDAR）等领域光电系统的发展，这些领域广泛应用于医疗保健和国家安全与国防。该项目为教育年轻研究人员（包括女性和少数族裔）提供了一个平台，培养他们对基础光学和光子学研究以及应用工程技术的热情。B 部分：超材料在过去十年中彻底改变了电磁学，产生了无数新现象，包括隐身、负电折射率和可调谐电磁复合材料。该项目的目标是开发动态可重构超材料来操纵太赫兹和红外光的波前，这是通过在超材料单元中集成 MEMS 执行器来实现的。对于有效的波前操纵，关键是在超材料晶胞的响应中实现恒定振幅的全跨度相位覆盖。然而，大多数超材料设计的幅度和相位响应都是有限的，这使得实现高效波前操纵具有挑战性。在所提出的工作中，将研究超材料层与地平面或两层超材料之间的耦合效应，以设计可以调制相位响应而对幅度响应影响很小的结构，即解耦幅度和相位调制。将开发制造工艺来构建基于表面和体微/纳米加工技术的超材料器件。将研究和优化超材料单元和 MEMS 执行器的集成，通过采用先进的 MEMS 集成和封装技术，包括三维布线、硅通孔 (TSV) 和倒装芯片接合，使每个单元都可以单独访问。最后，具有多功能性的可调谐超材料器件将被证明可以操纵太赫兹和红外光。这包括动态光束转向和聚焦，这是通过最先进的技术无法实现的，适用于光谱学、成像和激光雷达等各种应用。该奖项反映了 NSF 的法定使命，并被认为值得支持通过使用基金会的智力优点和更广泛的影响审查标准进行评估。

项目成果

On-demand terahertz surface wave generation with microelectromechanical-system-based metasurface

基于微机电系统的超表面按需产生太赫兹表面波

• DOI: 10.1364/optica.444999
• 发表时间: 2021-12
• 期刊: Optica
• 影响因子: 10.4
• 作者: Chen, Chunxu;Kaj, Kelson;Zhao, Xiaoguang;Huang, Yuwei;Averitt, Richard D.;Zhang, Xin
• 通讯作者: Zhang, Xin

A survey of theoretical models for terahertz electromagnetic metamaterial absorbers

太赫兹电磁超材料吸收器理论模型综述

• DOI: 10.1016/j.sna.2018.12.039
• 发表时间: 2019-03-01
• 期刊: Sensors and Actuators A: Physical
• 作者: G. Duan;J. Schalch;Xiaoguang Zhao;Aobo Li;Chunxu Chen;R. Averitt;Xin Zhang
• 通讯作者: Xin Zhang

Real-time tunable phase response and group delay in broadside coupled split-ring resonators

宽边耦合开环谐振器中的实时可调相位响应和群延迟

• DOI: 10.1103/physrevb.99.245111
• 发表时间: 2019-06-06
• 期刊: Physical Review B
• 影响因子: 3.7
• 作者: Xiaoguang Zhao;Jingdi Zhang;K. Fan;G. Duan;J. Schalch;G. Keiser;R. Averitt;Xin Zhang
• 通讯作者: Xin Zhang

Terahertz-Driven Stark Spectroscopy of CdSe and CdSe–CdS Core–Shell Quantum Dots

CdSe 和 CdSe-CdS 核-壳量子点的太赫兹驱动斯塔克光谱

• DOI: 10.1021/acs.nanolett.9b03342
• 发表时间: 2019-09
• 期刊: Nano Letters
• 影响因子: 10.8
• 作者: Pein, Brandt C.;Lee, Chee Kong;Shi, Liang;Shi, JiaoJian;Chang, Wendi;Hwang, Harold Y.;Scherer, Jennifer;Coropceanu, Igor;Zhao, Xiaoguang;Zhang, Xin;et al
• 通讯作者: et al

Optically Modulated Ultra-Broadband All-Silicon Metamaterial Terahertz Absorbers

光调制超宽带全硅超材料太赫兹吸收器

• DOI: 10.1021/acsphotonics.8b01644
• 发表时间: 2019-01-25
• 期刊: ACS Photonics
• 影响因子: 7
• 作者: Xiaoguang Zhao;Yue Wang;J. Schalch;G. Duan;Kevin A. Cremin;Jingdi Zhang;Chunxu Chen;R. Averitt;Xin Zhang
• 通讯作者: Xin Zhang