Fundamental Study of Ultra-Precision Machining and Near Surface Damage Evolution in Single Crystal Fluorides for Advanced Optics

先进光学用单晶氟化物超精密加工和近表面损伤演化的基础研究

基本信息

批准号：
1727244
负责人：
Don Lucca
金额：
$ 35.71万
依托单位：
Oklahoma State University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2017
资助国家：
美国
起止时间：
2017-10-01 至 2023-09-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1727244&HistoricalAwards=false
关键词：
Fundamental Study Ultra Precision Machining

项目摘要

Single crystal calcium fluoride is one of only a few materials that can be used for optics (lenses) which require the transmission of ultraviolet light. This is a result of its exceptionally low absorption in the ultraviolet spectral region. Optics produced from calcium fluoride are typically machined using an ultra-precision machining process with single crystal diamond tools, referred to as diamond turning. This machining process introduces near surface damage which increases the material's absorption of ultraviolet light. The mechanisms responsible for the degradation of optical quality caused by machining are not scientifically understood. This lack of understanding is limiting applications where diamond turning, as opposed to polishing, is required, for example, for nanometer precision aspheric or free-form optics. This study will contribute to new fundamental understanding of both the nature and extent of subsurface damage introduced into these brittle, optical materials by diamond turning. It is envisioned that the findings of this work will be applicable to a range of single crystal alkaline earth fluorides which are finding emerging uses in optical applications. The project is an international collaboration between Oklahoma State University (OSU), the Laboratory for Precision Machining (LFM) at the University of Bremen, Los Alamos National Laboratory (LANL) and Carl Zeiss Jena GmbH. NSF is only providing funding for the work done by OSU, but leverages research facilities not available in the US to the benefit of US innovation in several several sectors, most notably the ultraviolet optics used for lithograph in integrated circuit production. This represents a very large industry in the United States, and the results of this fundamental research could provide significant tangible benefits to the domestic economy. The international collaboration also provides a unique exposure of an American graduate student to manufacturing research at the highest levels of sophistication in both Germany and the US. The research objective of this research study is to test the hypothesis that the degradation in optical performance of single crystal calcium fluoride, which has been finished by ultra-precision machining, is directly related to the nature and extent of the near surface damage introduced. Ultra-precision machining experiments based on linear planing with round nose single crystal diamond tools will be used to determine the critical depth of cut to produce a non-fractured surface for a given crystal orientation. Based on these findings, linear planing and face turning experiments will be performed to generate surfaces for which the surface and subsurface state can be evaluated. Channeling Rutherford backscattering spectrometry (channeling RBS), cross-sectional transmission electron microscopy (XTEM) and high resolution transmission electron microscopy (HR-TEM), and x-ray diffraction (XRD) will be used to provide a quantitative characterization of the subsurface. The optical performance of the surface will then be assessed by measuring transmissivity using Ultraviolet-Visible (UV-Vis) spectroscopy and birefringence using a polarimeter allowing for the establishment of a quantitative link between spectrally resolved optical performance and subsurface damage to be made.

单晶氟化钙是少数可用于需要传输紫外线的光学器件（透镜）的材料之一。这是由于其在紫外光谱区域的吸收率极低。由氟化钙生产的光学器件通常采用单晶金刚石刀具的超精密加工工艺进行加工，称为金刚石车削。这种加工过程会造成近表面损伤，从而增加材料对紫外线的吸收。机械加工导致光学质量下降的机制尚未得到科学的理解。这种缺乏了解限制了需要金刚石车削而不是抛光的应用，例如纳米精度非球面或自由形状光学器件。这项研究将有助于对金刚石车削对这些脆性光学材料造成的表面下损伤的性质和程度有新的基本认识。预计这项工作的发现将适用于一系列单晶碱土金属氟化物，这些氟化物正在光学应用中找到新兴用途。该项目是俄克拉荷马州立大学 (OSU)、不莱梅大学精密加工实验室 (LFM)、洛斯阿拉莫斯国家实验室 (LANL) 和卡尔蔡司耶拿有限公司之间的国际合作项目。 NSF 仅为 OSU 所做的工作提供资金，但利用美国不具备的研究设施来促进美国在多个领域的创新，尤其是集成电路生产中用于光刻的紫外光学器件。这在美国是一个非常大的产业，这项基础研究的结果可以为国内经济带来显着的切实利益。国际合作还为美国研究生提供了独特的接触德国和美国最高水平的制造研究的机会。本研究的研究目的是检验这样的假设：通过超精密加工完成的单晶氟化钙的光学性能下降与引入的近表面损伤的性质和程度直接相关。基于圆头单晶金刚石刀具线性刨削的超精密加工实验将用于确定临界切削深度，以产生给定晶体取向的非断裂表面。基于这些发现，将进行线性刨削和端面车削实验，以生成可以评估表面和次表面状态的表面。通道卢瑟福背散射光谱法（通道 RBS）、横截面透射电子显微镜（XTEM）和高分辨率透射电子显微镜（HR-TEM）以及 X 射线衍射（XRD）将用于提供地下的定量表征。然后，通过使用紫外可见 (UV-Vis) 光谱测量透射率和使用旋光计测量双折射来评估表面的光学性能，从而在光谱分辨光学性能和亚表面损伤之间建立定量联系。

项目成果

期刊论文数量（5）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Influence of clamping technique on the resulting surface roughness in diamond machining of CaF2

金刚石加工 CaF2 时夹紧技术对表面粗糙度的影响

DOI：
发表时间：
2022-06
期刊：
Proceedings of the 20th euspen International Conference and Exhibition
影响因子：
0
作者：
Adam, B.;Riemer, O.;Rickens, K.;Lucca, D.A.;Tunesi, M.
通讯作者：
Tunesi, M.

Analysis of surface integrity of orthogonal diamond cut single-crystal Calcium Fluoride for ultraviolet and vacuum ultraviolet wavelength applications

用于紫外线和真空紫外线波长应用的正交金刚石切割单晶氟化钙的表面完整性分析

DOI：
发表时间：
2020-06
期刊：
Proceedings of the 20th euspen International Conference and Exhibition
影响因子：
0
作者：
Rickens, Kai;Riemer, Oltmann;Lucca, Don A.
通讯作者：
Lucca, Don A.

Ultra-Precision Machining: Cutting With Diamond Tools

超精密加工：用金刚石工具切割

DOI：
10.1115/1.4048194
发表时间：
2020-11-01
期刊：
Journal of Manufacturing Science and Engineering-transactions of The Asme
影响因子：
4
作者：
D. Lucca;M. J. Klopfstein;O. Riemer
通讯作者：
O. Riemer

Surface Integrity of Diamond Turned (100)Ge

金刚石车削 (100)Ge 的表面完整性

DOI：
10.1016/j.procir.2022.03.103
发表时间：
2022-01
期刊：
Procedia CIRP
影响因子：
0
作者：
Tunesi, M.;Lucca, D.A.;Davies, M.A.;Zare, A.;Gordon, M.C.;Sizemore, N.E.;Wang, Y.Q.
通讯作者：
Wang, Y.Q.

Development of a manual multi-axes workpiece adjustment system for ultraprecision diamond machining

超精密金刚石加工手动多轴工件调整系统的开发