CM/Collaborative Research: CloudMEMS: Cybermanufacturing of Micro-Electro-Mechanical Systems

CM/合作研究：CloudMEMS：微机电系统的网络制造

• 批准号: 1643941
• 负责人: Vijaya Kumar Devabhaktuni
• 金额: $ 17.5万
• 依托单位: University of Toledo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2019-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1643941&HistoricalAwards=false
• 关键词: CM; Collaborative; Research; CloudMEMS; Cybermanufacturing

The semiconductor industry is undergoing a shift towards creation of value-added products and services, rather than simply focusing on advancing the state-of-the-art in integrated circuit technology, with Micro-Electro-Mechanical Systems (MEMS) expected to play an increasingly important role in the new era. The design and development of Micro-Electro-Mechanical Systems entails sophisticated Computer-Aided-Design tools, elaborate microfabrication facilities, and extensive packaging infrastructures. Such technological barriers limit the abilities of innovators and entrepreneurs to access and use MEMS technologies. This award supports research to enable a novel, cloud-based MEMS design, development and manufacturing platform that is web-accessible, low cost, expansible and interactive. If successful, this research will foster cybermanufacturing innovation by enabling a new manufacturing service infrastructure that allows a wide range of customers and entrepreneurs to prototype their Micro-Electro-Mechanical Systems efficiently and at low cost, thereby directly benefitting the U.S. economy and society. This research also will lead to new curriculum in the rapidly emerging areas of cloud computing, electronics, microfabrication, and sensors. Educational, training, and outreach activities envisioned by this research will entail development of hands-on instructional material for minority and underrepresented high school students.The CloudMEMS platform will establish a novel "Design Anywhere, Manufacture Anywhere" approach in the design and development of Micro-Electro-Mechanical Systems via standardized processes and materials selections from leading semiconductor foundries easily made available to clients, designers, and entrepreneurs. The multi-university research team will systematically investigate process constraints in the Design-for-Manufacturing of next-generation Micro-Electro-Mechanical Systems toward enabling component design and fabrication using standard semiconductor foundry processes. The team will investigate sophisticated mathematical models and scaling laws capable of handling Micro-Electro-Mechanical Systems designs based on different structural materials and processes. Pertinent multi-pronged approaches for aiding Micro-Electro-Mechanical Systems design will be explored by (1) Fusing commercial Computer-Aided-Design packages into a cloud server and (2) Studying Micro-Electro-Mechanical Systems scaling laws for cost effective re-engineering of pre-simulated and pre-decomposed devices. The project will foster distinct design cycles for expert users and non-expert users who lack process knowledge. The CloudMEMS platform will be made accessible via Internet to bridge the cyber and manufacturing domains, thereby promoting leadership of the U.S. in cyber-driven microsystems and manufacturing.

半导体行业正在转向创建增值产品和服务的转变，而不是简单地专注于综合电路技术的最先进，而微型机械系统（MEMS）则预计会发挥作用在新时代越来越重要。微机械系统的设计和开发需要复杂的计算机辅助设计工具，精心设计的微加工设施和广泛的包装基础设施。这种技术障碍限制了创新者和企业家访问和使用MEMS技术的能力。该奖项支持研究，以实现一个基于云的新型MEMS设计，开发和制造平台，该平台可访问，低成本，可扩展和交互式。如果成功的话，这项研究将通过启用新的制造服务基础设施来促进网络制造创新，该基础设施允许各种各样的客户和企业家有效，低成本地原型其微机械系统系统，从而直接使美国经济和社会受益。这项研究还将导致云计算，电子，微加工和传感器快速新兴领域的新课程。这项研究所设想的教育，培训和外展活动将需要开发针对少数族裔和代表性不足的高中生的动手教学材料。CloudMems平台将在微型设计和开发中建立一种新颖的“在任何地方，在任何地方制造”的方法， - 通过标准化的过程和材料从领先的半导体铸造厂选择的电力机械系统很容易为客户，设计师和企业家提供。多元大学研究团队将系统地研究下一代微电机机械系统的设计过程中的过程限制，以使用标准的半导体铸造工艺来实现组件设计和制造。该团队将研究基于不同结构材料和过程的微机械系统设计的精致数学模型和缩放定律。 （1）将商用计算机辅助设计软件包融合到云服务器中，以及（2）研究微机械系统扩展定律以实现成本效益，（1）将相关的多管齐下方法用于辅助微型机械系统设计。 - 预先模拟和预测设备的工程。该项目将为缺乏流程知识的专家用户和非专家用户促进不同的设计周期。 CloudMems平台将通过Internet访问以弥合网络和制造领域，从而促进美国领导网络驱动的微系统和制造业。