Ion Sculpting of Multilayer Gratings for Extreme Ultraviolet Applications

用于极紫外应用的多层光栅的离子雕刻

• 批准号: 1508745
• 负责人: Carmen Menoni
• 金额: $ 50万
• 依托单位: Colorado State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-07-01 至 2019-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1508745&HistoricalAwards=false
• 关键词: Ion; Sculpting; Multilayer; Gratings; Extreme

This project is jointly funded by the Electronic and Photonic Materials Program (EPM) in the Division of Materials Research (DMR), and by the Electronics, Photonics, and Magnetic Devices Program (EPMD) in the Division of Electrical, Communications and Cyber Systems (ECCS). Nontechnical Description: With wavelengths of tens of nanometers, bright beams of extreme ultraviolet and soft x-ray light in combination with specialized optics are enabling applications such as nano-imaging and the lithography of advanced semiconductor chips. Extreme ultraviolet and soft x-ray applications require optical components, such as mirrors, lenses, and gratings, capable of guiding, focusing, and dispersing or filtering the light, respectively. There are, however, enormous challenges in the engineering of these optical components, from both the materials and design standpoints. In this project, directed ion beams interacting with the sample's surface create periodic patterns with a sawtooth form. By depositing stacks of nanometer-thick metal layers on these surfaces, it is possible to significantly enhance the efficiency of the multilayers and to produce advanced optics such as blazed diffraction gratings. Such gratings can generate highly directional beams that are necessary in important applications such as interference imaging, resonant inelastic x-ray scattering, and spectroscopy. This exciting new line of research offers ample opportunities for graduate and undergraduate students to work on a cutting-edge scientific and technological problem in a truly interdisciplinary environment. The breath of the outreach efforts of this project ensures participation of a diverse group of students at all levels.Technical Description: "Ion sculpting," i.e., bombarding a solid with a broad ion beam, can produce a remarkable variety of self-assembled nanoscale patterns on a solid surface. This project combines experiments and theoretical investigations with the goal of demonstrating a novel "ion sculpting" method to fabricate multilayer blazed gratings. This method has the potential to produce gratings of unprecedented efficiency for use at extreme ultraviolet and soft x-ray wavelengths. The project encompasses fundamental research aimed at understanding the interaction of highly directional ion beams with surfaces through experiments and modeling. The theoretical work facilitates the optimization of the ion-sculpting process and guides the experiments. State-of-the-art deposition equipment and at-wavelength metrology provide the infrastructure to fabricate and test the multilayer metal-dielectric gratings.

该项目由材料研究部（DMR）的电子和光子材料计划（EPM）以及电气，通信和网络系统（ECC）的电子，光子和磁性设备计划（EPMD）共同资助。非技术描述：具有数十个纳米的波长，极端紫外线的明亮光束和软X射线光与专门的光学功能相结合，可以实现纳米成像等应用，以及高级半导体芯片的光刻。极端的紫外线和软X射线应用需要分别能够指导，聚焦和分散或过滤光的光学组件，例如镜子，镜头和光栅。但是，从材料和设计的角度来看，这些光学组件的工程都面临着巨大的挑战。在这个项目中，定向离子束与样品表面相互作用，以锯齿状形式产生周期性图案。通过在这些表面上沉积纳米厚金属层的堆栈，可以显着提高多层效率并产生高级光学元件，例如燃烧的衍射光栅。这样的光栅可以在重要应用中产生高度方向的光束，例如干扰成像，谐振非弹性X射线散射和光谱法。这项令人兴奋的新研究为研究生和本科生提供了充足的机会，可以在真正的跨学科环境中解决尖端的科学和技术问题。该项目的宣传工作的呼吸确保了各个级别的各种学生的参与。技术描述：“离子雕刻”，即用宽阔的离子光束轰炸固体，可以产生各种各样的自我组装的纳米尺度模式。该项目将实验和理论研究结合在一起，目的是展示一种新颖的“离子雕刻”方法来制造多层式光栅。该方法有可能产生前所未有的效率光栅，以在极端紫外线和软X射线波长下使用。该项目涵盖了旨在通过实验和建模来理解高方向离子光束与表面的相互作用的基础研究。理论工作促进了离子雕刻过程的优化，并指导实验。最先进的沉积设备和在波长的计量设备提供了制造和测试多层金属式光栅的基础设施。