GOALI: Lateral-Mode MEMS Filter Arrays on Ultrananocrystalline Diamond for Multi-Band Communication

GOALI：用于多频段通信的超纳米晶金刚石横向模式 MEMS 滤波器阵列

• 批准号: 1440163
• 负责人: Reza Abdolvand
• 金额: $ 13.02万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2014
• 资助国家: 美国
• 起止时间: 2014-01-01 至 2017-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1440163&HistoricalAwards=false
• 关键词: GOALI; Lateral; Mode; MEMS; Filter

ObjectiveThe objective of the proposed research is to significantly advance the field of MEMS filters by putting forward innovative solutions that tackle the issues hindering widespread deployment of MEMS filters such as high insertion loss, low power handling, and limited bandwidth. Our approach is to exploit high-coupling-factor thin-film piezoelectric materials in combination with novel impedance matching techniques to improve the performance of acoustically-coupled monolithic filters, which are fabricated on ultra-nanocrystalline diamond (UNCD) substrates. Intellectual MeritThis research is expected to overcome current limitations of MEMS filters and establish lateral-mode MEMS filters as a viable candidate for emerging multi-band transceivers. Specifically, the significance of the proposed activities is as follows: Finite element models are developed that can fully capture the frequency response of a piezoelectric MEMS filter. UNCD is utilized to scale up the frequency and improve the power handling of MEMS filters. Impedance matching networks are integrated with thin-film piezoelectric-on-UNCD filters. Novel processes for direct deposition of high-coupling-factor piezoelectric films on UNCD are developed.Broader Impacts The successful demonstration of low-loss thin-film piezoelectric-on-UNCD filters proposed in this work will have a significant impact on how future RF transceiver architectures will be designed. This proposal will provide opportunities for OSU graduate and undergraduate students (with priority given to students from under-represented groups) to work with industrial scientists and gain experience in an industrial setting at Advanced Diamond Technologies Inc. Results from the project will be disseminated through presentation in prestigious conferences and publication in high-impact journals.

目的本次研究的目的是通过提出创新解决方案来解决阻碍 MEMS 滤波器广泛部署的问题（例如高插入损耗、低功率处理和有限带宽），从而显着推进 MEMS 滤波器领域的发展。我们的方法是利用高耦合因数薄膜压电材料与新颖的阻抗匹配技术相结合，以提高声耦合单片滤波器的性能，该滤波器是在超纳米晶金刚石（UNCD）基板上制造的。智力价值这项研究预计将克服 MEMS 滤波器当前的局限性，并将横向模式 MEMS 滤波器确立为新兴多频段收发器的可行候选者。 具体来说，所提议活动的意义如下：开发了可以完全捕获压电MEMS滤波器频率响应的有限元模型。 UNCD 用于扩大频率并提高 MEMS 滤波器的功率处理能力。 阻抗匹配网络与UNCD 薄膜压电滤波器集成。开发了在 UNCD 上直接沉积高耦合因数压电薄膜的新工艺。 更广泛的影响 这项工作中提出的低损耗薄膜压电 on-UNCD 滤波器的成功演示将对未来射频收发器的方式产生重大影响将设计架构。该提案将为俄勒冈州立大学研究生和本科生（优先考虑来自代表性不足群体的学生）提供与工业科学家合作并在 Advanced Diamond Technologies Inc. 获得工业环境经验的机会。该项目的结果将通过演示形式传播参加著名会议并在高影响力期刊上发表文章。