High-Vacuum Molecular Micropumps for High Performance Gas Analysis Microsystems

用于高性能气体分析微系统的高真空分子微型泵

• 批准号: 1310013
• 负责人: Carlos Mastrangelo
• 金额: $ 36万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-06-15 至 2016-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1310013&HistoricalAwards=false
• 关键词: Vacuum; Molecular; Micropumps; Performance; Gas

The generation of high vacuum environments is essential in many chemical analysis analytical techniques such as mass spectrometry which constitutes the gold standard in many applications. In spite of great progress achieved in miniaturization techniques for sensor analysis systems over the past three decades, vacuum instruments have largely remain un-scaled due to the lack of miniaturized devices that can pump down to low vacuums. In this work we propose the design construction and testing of microfabricated molecular pumps that can attain micro-volume pressures of a few µTorr. We believe these devices will permit the realization of precision vacuum analytical micro-instruments for a wide range of applications.Intellectual Merit: The identification of chemical species is of vital importance in analytical instrumentation for liquid and gas based samples. In particular, the mass spectrometer is the gold standard instrument used for identifying species with exquisite resolution, but it intrinsically requires micro-Torr vacuums and bulky and expensive high vacuum pumps. Interest in the realization of low-cost portable handheld gas sensing microsystems has motivated research in gas micro-pumping technology for more than two decades, but it has not yet produced a micro-Torr capable micropump for micro-environments. The availability of high-vacuum micropumps is critical for the realization of miniaturized mass spectrometers for gas analyzers. Such analyzers enable high-sensitivity detection of chemical, biological agents and explosives in a micro-miniature integrated form never realized before. The principal goal of this work is the development of new pumping techniques and devices for the realization of high performance micro-Torr vacuum pumps suitable for analytical micro-instrumentation. Broader Impacts: The potential societal and economic impacts of this project are very important.Microfabricated high vacuum pumps are key components enabling the realization of miniature precision gas analysis equipment based on mass spectrometry. The successful implementation of this research can realize mass spectrometers of the size of a postage stamp. Such miniaturized mass spec has diverse applications in life sciences and national security. Presently the US government has a strong interest in detection and conclusive identification of harmful or dangerous gas phase compounds such as explosives, nerve gas, and other agents at very low concentrations in a pervasive manner. This project will specifically locally promote and develop a range of broader impact and outreach educational activities. In particular we will engage high-school student participation and awareness via the University of Utah nano camps, and we will promote the work to the local community including local high-diversity high schools (Salt Lake City East and West High). These camps are aimed to capture the interest of our excellent local high-school students from West and East high school campuses.

高真空环境的产生对于许多化学分析技术（例如质谱分析）至关重要，质谱分析是许多应用中的黄金标准。由于缺乏可以抽吸至低真空的小型化设备，我们提出了可以达到几 µTorr 微体积压力的微型分子泵的设计结构和测试。设备将允许实现广泛应用的精密真空分析微型仪器。 智力优点：化学物质的识别对于液体和气体样品的分析仪器至关重要，特别是质谱仪是黄金。用于以精细分辨率识别物种的标准仪器，但它本质上需要微托真空和笨重且昂贵的高真空泵，对实现低成本便携式手持式气体传感微系统的兴趣推动了气体微泵技术的研究。二十多年来，它还没有生产出适用于微环境的微托微型泵，高真空微型泵的可用性对于实现气体分析仪的小型化质谱仪至关重要。这项工作的主要目标是开发新的抽气技术和设备，以实现适用的高性能微托真空泵。更广泛的影响：该项目的潜在社会和经济影响非常重要，微型高真空泵是实现基于质谱的微型精密气体分析设备的关键部件。实现邮票大小的质谱仪在生命科学和国家安全方面具有多种应用。目前，美国政府对有害或危险气相化合物的检测和最终鉴定有着浓厚的兴趣。该项目将在当地进行专门宣传，并开展一系列更广泛的影响和外展教育活动，特别是，我们将通过以下方式吸引高中生参与和提高认识。犹他大学纳米夏令营，我们将向当地社区推广这项工作，包括当地的高多样性高中（盐湖城东高中和西高中）。这些夏令营旨在吸引我们当地优秀高中生的兴趣。西、东高中校园。