Collaborative Research: Monolithic on-chip resonant cavity isolators for photonic integrated circuits

合作研究：用于光子集成电路的单片片上谐振腔隔离器

• 批准号: 1231392
• 负责人: S. Ismat Shah
• 金额: $ 24.91万
• 依托单位: University of Delaware
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-01 至 2016-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1231392&HistoricalAwards=false
• 关键词: Collaborative; Research; Monolithic; chip; resonant

The objective of this research is to demonstrate monolithic integration of magneto-optical isolators on semiconductor substrates and to characterize their performance. The approach is based on developing a nonreciprocal resonant optical cavity device using monolithically grown polycrystalline cerium-yttrium-iron-garnet as the magneto-optical medium, and new photosensitive chalcogenide glass materials for robust post-fabrication trimming. The research will leverage gray-scale processing technologies and high-order Fano resonant cavity architectures to realize record-breaking device performance.The intellectual merit of this work is the combination of new materials and innovative device designs. Prior on-chip isolators have largely relied on wafer bonding of magneto-optical garnets, traditionally considered incompatible with monolithic integration on semiconductors. The proposed work will combine new growth methods and materials with new device designs to simultaneously achieve monolithic integration, passive device operation, large isolation ratio, minimal insertion loss, small footprint, as well as superior fabrication tolerance, thus resolving the standing challenge of efficient on-chip optical isolation.The broader impacts of this work include its potentially transformative impact on the field of optical communications and photonic signal processing by providing the first practical solution for monolithic on-chip isolation. When the number of components in a photonic chip increases, parasitic reflections between components can seriously jeopardize circuit functionalities by destabilizing laser and circuitry operation. The need for on-chip isolation therefore becomes imperative as the level of photonic integration continues to scale. The scientific research will be tightly integrated with graduate course development, undergraduate training, and development of hands-on modules for K-12 classrooms at both institutes.

本研究的目的是展示半导体基板上磁光隔离器的单片集成并表征其性能。该方法基于开发一种非互易谐振光学腔器件，使用单片生长的多晶铈-钇-铁-石榴石作为磁光介质，以及用于稳健的制造后修整的新型光敏硫族化物玻璃材料。该研究将利用灰度处理技术和高阶 Fano 谐振腔架构来实现破纪录的器件性能。这项工作的智力优势在于新材料和创新器件设计的结合。先前的片上隔离器很大程度上依赖于磁光石榴石的晶圆键合，传统上认为这与半导体上的单片集成不兼容。所提出的工作将新的生长方法和材料与新的器件设计相结合，同时实现单片集成、无源器件操作、大隔离比、最小插入损耗、小占地面积以及卓越的制造公差，从而解决高效导通的长期挑战。这项工作的更广泛影响包括通过为单片片上隔离提供第一个实用解决方案，对光通信和光子信号处理领域产生潜在的变革性影响。当光子芯片中的元件数量增加时，元件之间的寄生反射会破坏激光器和电路运行的稳定性，从而严重危害电路功能。因此，随着光子集成水平的不断扩大，对片上隔离的需求变得势在必行。科学研究将与两个学院的研究生课程开发、本科生培训以及 K-12 课堂实践模块的开发紧密结合。