MRI: Acquisition of an Electron Beam Lithography System for the NCSU Nanofabrication Facility

MRI：为 NCSU 纳米加工设施购置电子束光刻系统

• 批准号: 1229182
• 负责人: Mehmet Ozturk
• 金额: $ 96万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-01 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1229182&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Lithography

Objective: This proposal is for a new electron beam lithography and imaging system to augment the nanoscale fabrication capabilities at NC State University for a wide range of applications and users. Intellectual Merit: This acquisition proposal is expected to lead to high-performance nano-devices for nanoelectronics, opto-electronics, nanofluidic bio-sensors, and nanogap sensors. The electron beam lithography system and imaging system will have the capability to reach the resolutions down to 10 nm on six inch wafers. The PI manages the Microelectronics center, where this new tool will be located. The new tool will be widely used, with over 40 faculty members actively involved in research that will be enabled by this tool; 20 specific research projects of high impact have been described in this proposal. This new instrument proposed here will catalyze and accelerate interdisciplinary research in nanoscience on a variety of technical fields.Broader Impacts: The requested instrument will serve 4 colleges and 10 departments at NC State and hence is expected to serve a large population of faculty and their respective students. The research enabled by the requested system will have significant impact in both graduate and undergraduate research and training at NC State and the instrument will be integrated into several lab courses. Outreach activities include involvement with Shaw University, a local HBCU, and summer internships for minority students providing getting hands-on education and research training.

目的：该建议是针对新的电子束光刻和成像系统的，以增强北卡罗来纳州立大学的纳米级制造能力，用于广泛的应用和用户。智力优点：预计该收购建议将导致纳米电子，光电，纳米流体生物传感器和纳米类传感器的高性能纳米设备。电子束光刻系统和成像系统将有能力在六英寸晶片上达到10 nm的分辨率。 PI管理了该新工具的微电灯中心。 新工具将被广泛使用，该工具将启用的40多名教职员工积​​极参与研究；该提案中已经描述了20个具有高影响力的特定研究项目。此处提出的这项新工具将在各种技术领域中催化并加速纳米科学的跨学科研究。BRODER的影响：所请求的工具将为NC州的4所大学和10个部门提供服务，因此预计将为大量教师及其各自的学生提供服务。 由请求的系统启用的研究将对NC State的研究生和本科研究和培训产生重大影响，该工具将融入几个实验室课程中。外展活动包括参与邵氏大学，当地的HBCU，以及为获得动手教育和研究培训的少数族裔学生的暑期实习。