GOALI: ADVANCING THE UNDERLYING SCIENCE OF IN-LINE RF METROLOGY AND PULSED RF POWER DELIVERY FOR LOW TEMPERATURE PLASMA HEATING

目标：推进低温等离子体加热的在线射频计量和脉冲射频功率传输的基础科学

• 批准号: 1202259
• 负责人: Steven Shannon
• 金额: $ 30万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-07-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1202259&HistoricalAwards=false
• 关键词: GOALI; ADVANCING; UNDERLYING; SCIENCE; LINE; GOALI; ADVANCING; UNDERLYING; SCIENCE; LINE

This project will advance a class of manufacturing processes that are critical to the high technology economy of the United States through a unique academic / industry partnership that will advance manufacturing through science-based understanding and application of learning to systems used in a plurality of domestic industries spanning electronics, energy, and the environment. These manufacturing processes utilize reactive plasma systems that are driven by radio frequency power sources. Specifically, this program will advance the knowledge of pulsed radio frequency heating to advance plasma assisted manufacturing capability for future technology manufacturing nodes. Pulsed Radio Frequency (PRF) heating of these plasmas demonstrates unprecedented dynamic range in its ability to modify plasma chemistry and plasma/surface interactions. The advancement of stable, manufacturing worthy systems that employ PRF will enable new processes for applications of broad national interest including integrated circuit fabrication, energy production, and medical applications. This project will advance the understanding of plasma response to transient RF systems by correlating measured plasma conditions via a suite of time resolved diagnostics to waveform-resolved voltage, current, and phase measurements made with an in-line RF measurement system capable of resolving the transient response of the electrical system to levels of accuracy previously not available to the scientific community. This project will leverage this unique academic/industry partnership to develop educational modules that will be incorporated into not only an established STEM program in plasma science, but also into freely accessible continuing education modules for mid-career technologists considering a focus in low temperature plasma applications in their profession. Finally, this project will develop instructional, visually stimulating media designed to educate high-school level science teachers on the application of plasma science in an array of industries that are tangible to the typical high school student, such as microelectronics, display technology, and photovoltaic fabrication.

该项目将通过独特的学术 /行业合作伙伴关系来推进对美国高科技经济至关重要的制造过程，这些过程将通过基于科学的理解和对学习系统用于多个家庭行业的系统来推进制造，这些系统涵盖了电子，能源和环境。 这些制造过程利用了由射频功率源驱动的反应性等离子体系统。具体而言，该程序将提高脉冲射频加热的知识，以提高血浆辅助制造能力，以促进未来的技术制造节点。 这些等离子体的脉冲射频（PRF）加热表明其修饰血浆化学和血浆/表面相互作用的能力前所未有。 使用PRF的稳定，制造价值的系统的进步将为广泛的国家利益的应用提供新的流程，包括综合电路制造，能源生产和医疗应用。 该项目将通过通过一组时间分解的诊断与波形分辨电压，电流和相测量相关联的等离子条件，通过在线RF测量系统与波形分解电压，电流和相测量相关联，来提高对瞬时RF系统的了解，从而可以解决与先前无法为科学群体提供的精确度的瞬时响应。 该项目将利用这种独特的学术/行业合作伙伴关系来开发教育模块，这些模块将不仅纳入等离子体科学领域的既定STEM计划，而且还将纳入中型职业技术人员的自由访问的继续教育模块中，考虑到低温等离子体在其职业中的焦点。 最后，该项目将开发教学，视觉刺激的媒体，旨在教育高中级的科学教师有关等离子体科学在一系列行业中的应用，这些行业对典型的高中生有形，例如微电子，显示技术和光伏制造。