GOALI/Collaborative Research: Deciphering the Mechanisms of Wear to Enable High Performance Tip-Based Nanomanufacturing

GOALI/合作研究：破译磨损机制，实现基于尖端的高性能纳米制造

• 批准号: 1200019
• 负责人: Robert Carpick
• 金额: $ 41.61万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-10-01 至 2016-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1200019&HistoricalAwards=false
• 关键词: GOALI; Collaborative; Research; Deciphering; Mechanisms

Tip-based nanomanufacturing (TBN) is a promising and scalable platform for fabricating nanostructures en masse with high precision. All TBN processes hinge on the availability of nanoscale atomic force microscope (AFM) tips that can survive the long-lasting and harsh conditions of TBN processes without substantial changes in composition or geometry. However, the scientific understanding of nanoscale wear, particularly under the extreme conditions encountered as TBN processes are scaled up, is lacking. This grant provides funding to rigorously develop the fundamental science of nanoscale wear that is needed to realize robust probes for high-performance, high-rate TBN processes. The integrated, interdisciplinary research plan consists of advanced atomistic simulations integrated with continuum models, and innovative experiments that include in-situ wear studies combining AFM with electron microscopy. The research will focus on understanding the performance of ultrananocrystalline diamond (UNCD) AFM probes manufactured by the industrial partner, Advanced Diamond Technologies (ADT), as well as conventional commercial probes based on silicon. Interactions with additional industrial collaborators pursuing commercial TBN processes will be leveraged to select relevant conditions for the studies, and to optimize the design of scalable TBN processes and probes based on the research findings.If successful, this research will transform a broad range of TBN methods from bench-top prototype processes to commercially-viable applications. This will be achieved by realizing new approaches to minimize tip wear in scaled-up TBN processes. The understanding of wear that is developed will apply to the design and fabrication of reliable probes for a broad range of TBN methods. Tangible outcomes will include the deployment of UNCD probes for high performance TBN, and the establishment of operating conditions for achieving improved performance in commercially-viable TBN. The education and outreach activities will lead to a new short-course on TBN aimed at industry audiences, research experiences for high school science teachers, and the advanced training of students.

基于尖端的纳米制造（TBN）是一种有前途且可扩展的平台，用于高精度地大规模制造纳米结构。所有 TBN 工艺都取决于纳米级原子力显微镜 (AFM) 尖端的可用性，这些尖端可以在 TBN 工艺的长期和恶劣条件下生存，而不会在成分或几何形状方面发生重大变化。然而，人们缺乏对纳米级磨损的科学理解，特别是在 TBN 工艺规模扩大时遇到的极端条件下。这笔赠款为严格开发纳米级磨损的基础科学提供资金，这是实现高性能、高速率 TBN 工艺所需的稳健探针所必需的。这项综合的跨学科研究计划包括与连续介质模型集成的先进原子模拟，以及包括原子力显微镜与电子显微镜相结合的原位磨损研究在内的创新实验。该研究将重点了解工业合作伙伴 Advanced Diamond Technologies (ADT) 制造的超纳米晶金刚石 (UNCD) AFM 探针以及基于硅的传统商用探针的性能。 将利用与其他追求商业 TBN 工艺的工业合作者的互动来选择研究的相关条件，并根据研究结果优化可扩展的 TBN 工艺和探针的设计。如果成功，这项研究将改变广泛的 TBN 方法从台式原型工艺到商业上可行的应用。这将通过在扩大的 TBN 工艺中实现最小化尖端磨损的新方法来实现。 对磨损的理解将应用于各种 TBN 方法的可靠探头的设计和制造。切实成果将包括部署用于高性能 TBN 的 UNCD 探测器，以及建立操作条件以提高商业可行的 TBN 性能。教育和推广活动将带来针对行业受众的新 TBN 短期课程、高中科学教师的研究经验以及学生的高级培训。