SBIR Phase I: Nanometrology using Low-Cost, High Performance and Long Working Range Super-Homodyne Interferometer

SBIR 第一阶段：使用低成本、高性能和长工作范围的超零差干涉仪进行纳米计量

基本信息

批准号：
1013518
负责人：
Benjamin Dingel
金额：
$ 15万
依托单位：
Nasfine Photonics, Inc.
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2010
资助国家：
美国
起止时间：
2010-07-01 至 2011-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1013518&HistoricalAwards=false
关键词：
SBIR Phase Nanometrology using Low

项目摘要

This Small Business Innovation Research (SBIR) Phase I project aims to investigate the feasibility of an innovative, super-homodyne interferometer for high-precision distance measurement with long dynamic range (more than two orders larger than the fundamental wavelength) and high resolution (less than one half-wavelength). If successful, this would represent the longest working distance of any reported homodyne-based interferometer design. The new device is referred to as a super-homodyne interferometer (SHI). The innovation represents a fundamental yet simple modification of existing systems, with the same basic structure as a homodyne interferometer, but exhibiting the superior performance of heterodyne interferometers. In Phase 1, we will focus on the design, prototyping, testing, and measurement of the super-homodyne interferometer.The broader impact/commercial potential of this project will extend to a number of markets and applications. The interferometer is one of the most fundamental tools in measurement science and nanotechnology. Interferometers set the standard for precise distance measurement and are extensively used in the areas of semiconductor fabrication, robotics, precision sensing, machine tools, vibrometry, laser-Doppler velocimetry, and laser microscopy. The successful introduction of SHI products will represent a major engineering advance with a huge impact on measurement science and basic and applied research and development.

该小型企业创新研究 (SBIR) 第一阶段项目旨在研究创新型超零差干涉仪的可行性，该干涉仪用于具有长动态范围（比基本波长大两个数量级）和高分辨率（小于超过二分之一波长）。如果成功，这将代表任何已报道的基于零差的干涉仪设计的最长工作距离。这种新设备被称为超零差干涉仪（SHI）。这项创新代表了对现有系统的基本而简单的修改，其基本结构与零差干涉仪相同，但展示了外差干涉仪的优越性能。在第一阶段，我们将重点关注超零差干涉仪的设计、原型制作、测试和测量。该项目更广泛的影响/商业潜力将扩展到许多市场和应用。干涉仪是测量科学和纳米技术中最基本的工具之一。干涉仪设定了精确距离测量的标准，广泛应用于半导体制造、机器人、精密传感、机床、振动测量、激光多普勒测速和激光显微镜等领域。 SHI产品的成功推出将代表着一项重大工程进步，对测量科学以及基础和应用研究与开发产生巨大影响。