Highly miniaturised fatigue test platform for thermo-mechanical and reliability characterisation of heterogeneously and bottom-up integrated nanofunctionalised components.

高度小型化的疲劳测试平台，用于异构和自下而上集成纳米功能化组件的热机械和可靠表征。

• 批准号: 195216076
• 负责人: Professorin Dr.-Ing. Karla Hiller
• 金额: --
• 依托单位: Zentrum für Mikrotechnologien (ZfM)
• 依托单位国家: 德国
• 项目类别: Research Units
• 财政年份: 2011
• 资助国家: 德国
• 起止时间: 2010-12-31 至 2018-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/195216076?language=en
• 关键词: Highly; miniaturised; fatigue; test; platform

The objective of TP3 during the second phase of the project is the design, technology development and realization as well as the characterization of a technology-neutral, universal and highly miniaturized fatigue test platform in MEMS technology. This platform will serve for the systematic thermo-mechanical loading of bottom-up heterogeneously integrated nano-functional elements under realistic loads, including the effects of pressure, temperature and humidity. On the MEMS scale, this represents a completely new approach. First, the focus is on DEP self-assembled and micro-positioned CNTs, later other nanowires or nano membrane structures manufactured from Si, BN or Al are of interest.The second phase is consistently aiming at the newly emerging challenges of reliability assessment at the nano scale. To reach this goal, the cooperation with the TP1, 2, 4, 5, 6 and 8 is mandatory.AP1 includes the design for the development of the fatigue testing platform as well as the apparatus of the simulative and experimental methods for reliability assessment. The aim is the consistent integration and purely electrical control and readout of the individual MEMS components into a dynamic mechanical testing device which is capable of applying alternating and subcritical loads. Very important is the involvement of the other TP regarding technological integration, especially regarding the compatibility of the targeted nano-functional elements of the platform, combined with maximum universality of the testing platform itself. Key philosophy here is the "sample centric approach": The testing device may be build, if necessary, as a result of the MEMS processes, around the already assembled test specimen.AP2 bundles in cooperation with TP2, the development of design concepts, the optimization using FE simulation, used for the layout of the MEMS platform, and the integration of multi-scale models of molecular dynamics (TP1) into the design environment foreseen for fatigue analysis and description of failure mechanisms. Particularly important is the consideration of imperfections, such as defects and functional groups, but also the structure-property correlation and its dependence on processing, in particular with respect to interface properties. In addition, concepts for reliability assessment under the given loading conditions have to be developed.AP3 involves the development of technologies for the fatigue testing platform, the integration of the MEMS components and the testing of integrated nano-functional elements, provided by TP5, 6 and 8. In comparison to the 1st phase, more resources for technology development have to be planned, which allows the realization of all planned goals.AP4 aims at the experimental validation of the fatigue testing platform and the thermo-mechanical characterization of nano-functional elements compared to the simulations. Modern failureanalytical techniques, such as FIB, SEM and TEM are used to determine structure-property c.

TP3项目第二阶段的目标是设计、技术开发和实现以及MEMS技术中技术中立、通用和高度小型化的疲劳测试平台的表征。该平台将用于在实际载荷下（包括压力、温度和湿度的影响）对自下而上的异质集成纳米功能元件进行系统的热机械载荷。在 MEMS 规模上，这代表了一种全新的方法。首先，重点是 DEP 自组装和微定位 CNT，随后由 Si、BN 或 Al 制造的其他纳米线或纳米膜结构也受到关注。第二阶段始终致力于解决可靠性评估中新出现的挑战。纳米级。为了实现这一目标，必须与TP1、2、4、5、6和8进行合作。AP1包括疲劳测试平台的开发设计以及可靠性评估的模拟和实验方法装置。其目标是将各个 MEMS 组件一致集成、纯电气控制和读出到动态机械测试设备中，该设备能够施加交变和亚临界负载。非常重要的是其他TP在技术集成方面的参与，特别是在平台目标纳米功能元件的兼容性方面，以及测试平台本身的最大通用性。这里的关键理念是“以样品为中心的方法”：如有必要，可以通过 MEMS 工艺，围绕已组装的测试样品构建测试设备。AP2 与 TP2 合作，开发设计概念，使用 FE 仿真进行优化，用于 MEMS 平台的布局，并将分子动力学 (TP1) 的多尺度模型集成到可预见的疲劳分析和故障机制描述的设计环境中。特别重要的是要考虑缺陷，例如缺陷和官能团，还要考虑结构-性能相关性及其对加工的依赖性，特别是界面性能。此外，必须开发给定负载条件下可靠性评估的概念。AP3涉及疲劳测试平台、MEMS组件集成和集成纳米功能元件测试的技术开发，由TP5、6提供8. 与第一阶段相比，需要规划更多的技术开发资源，从而实现所有计划目标。AP4旨在疲劳测试平台的实验验证和纳米功能材料的热机械表征元素相比模拟。现代失效分析技术，如 FIB、SEM 和 TEM 用于确定结构性能 c．