Fundamental Investigation of Pulsed Laser Irradiation on Metal Oxide Gas Sensor Performance

脉冲激光照射对金属氧化物气体传感器性能的基础研究

• 批准号: 0933069
• 负责人: Ahalapitiya Jayatissa
• 金额: $ 26万
• 依托单位: University of Toledo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0933069&HistoricalAwards=false
• 关键词: Fundamental; Investigation; Pulsed; Laser; Irradiation

Metal oxide semiconductor films have found extensive applications in gas sensors in the last few decades. However, rapidly growing need for comprehensive monitoring of the environmental impact of industrial emissions demands detection, at the few parts per million levels, of pollutant or industrial gases. This significant challenge has to be met by synthesis of new sensor materials.The objective of this research project is to investigate the fundamental phenomena of laser irradiation on metal oxide-based thin films relevant to gas sensor performance by employing experimental as well as computational approaches. The investigation will be conducted using tungsten trioxide (WO3) and tin oxide (SnO2) as the model materials. The carrier mobility and conductivity of sensor films will be measured as functions of the power level, the number of pulses of the laser and selective doping. The surface and microstructure will be examined to understand the effect of laser irradiation on these films. After optimizing for laser power, number of pulses and film growth parameters micro gas sensors will be fabricated. A coordinated experimental and computational study for the heat transfer mechanism from the laser to the film and its effect on microstructure and hence on electronic properties relevant to sensor performance will be undertaken. The proposed research is expected to provide greater fundamental understanding of the phenomena associated with the interaction of pulsed lasers and metal oxide sensor film. It is envisioned that the proposed method will create faster and more sensitive gas sensors because the carrier mobility and active surface area of sensor film are increased by laser irradiation. The research may also result in a better sensor response at lower temperatures. This processing technique is transferable to a manufacturing process of an industrial scale. A synergistic theoretical and computational investigation of the laser induced heating and crystallization of the metal oxide film will be carried out. This joint endeavor will speed the optimization of process parameters. This proposed research advances a novel method to significantly enhance the performance of metal oxide-based gas sensors. Scientifically, it will lead to insights into the underlying mechanism of interaction of laser beams and metal oxides. Educationally it will involve regional high school students in leading edge research, and educate and inspire them and pique their interest to pursue careers in science and engineering. Expansion of opportunities for undergraduate research experience and under-represented students will be emphasized.

过去几十年来，金属氧化物半导体薄膜在气体传感器中得到了广泛的应用。然而，对工业排放对环境影响的全面监测的需求迅速增长，要求对污染物或工业气体进行百万分之几的检测。这一重大挑战必须通过合成新的传感器材料来应对。该研究项目的目的是通过采用实验和计算方法来研究与气体传感器性能相关的金属氧化物薄膜上激光照射的基本现象。该研究将使用三氧化钨（WO3）和氧化锡（SnO2）作为模型材料进行。传感器薄膜的载流子迁移率和电导率将作为功率水平、激光脉冲数和选择性掺杂的函数来测量。将检查表面和微观结构，以了解激光照射对这些薄膜的影响。 在优化激光功率、脉冲数和薄膜生长参数后，将制造出微型气体传感器。将针对从激光到薄膜的传热机制及其对微观结构以及与传感器性能相关的电子特性的影响进行协调的实验和计算研究。拟议的研究预计将为脉冲激光和金属氧化物传感器薄膜相互作用相关的现象提供更深入的基础理解。 预计所提出的方法将创建更快、更灵敏的气体传感器，因为激光照射增加了传感器薄膜的载流子迁移率和活性表面积。 该研究还可能导致传感器在较低温度下具有更好的响应。 该加工技术可转移至工业规模的制造过程。将进行激光诱导加热和金属氧化物薄膜结晶的协同理论和计算研究。这种共同努力将加速工艺参数的优化。 这项研究提出了一种显着提高金属氧化物气体传感器性能的新方法。从科学上讲，它将深入了解激光束和金属氧化物相互作用的基本机制。在教育方面，它将让地区高中生参与前沿研究，教育和激励他们并激发他们从事科学和工程职业的兴趣。将强调扩大本科生研究经验和代表性不足的学生的机会。