SGER: Feasibility Study of Nano-Electrochemical Machining Process

SGER：纳米电化学加工工艺的可行性研究

• 批准号: 0331830
• 负责人: Kamlakar Rajurkar
• 金额: $ 9.35万
• 依托单位: University of Nebraska-Lincoln
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-01 至 2006-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0331830&HistoricalAwards=false
• 关键词: SGER; Feasibility; Study; Nano; Electrochemical

Extensive research in Nanoscience and Nanotechnology in various fields such as biology,optics, telecommunication, material and electronics promises novel and sustainabletechnologies and products. To fulfill the promise, a set of new manufacturing processesand manufacturing paradigms are needed for industrial scale production. A recentlyconducted NSF workshop on Nonomanufacturing and Processing recommends bottom up(such as electroforming and assembly) and top down (such as EDM, ECM, laser andetching) processes as potential technologies for generating 1D, 2D, and 3Dnanostructures and devices.This SGER proposal seeks funding to study the feasibility of developing a Nano-ElectrochemicalMachining (Nano-ECM) process. Electrochemical machining (ECM)process, an anodic dissolution process, selectively removes material atom by atom andthus avoids post-processing operations. As ECM is a non-thermal and non-mechanicalcontact process, it generates burr-free and stress-free surfaces. Micro-ECM process hasshown to be highly successful in machining arbitrary 3D micro shapes. Therefore, ECMseems an ideal candidate as one of the top down nanomachining processes. However,many scientific and technical barriers and associated risks must be considered andaddressed for the realization of Nano-ECM process.Intellectual Merit:This study will establish an extensive and comprehensive knowledge base of the state-of-theart research in electrochemical deposition and dissolution at nanoscale and relatedscientific and technical barriers. An attempt will be made to develop a mathematicalmodel to describe Nano-ECM process by taking into consideration mass transportprocess at a very small gap, coupled modes of mass transport, coupling of Faradicprocesses and statistical aspects of discrete events of reactions. A Nano-ECM cell will beassembled using an Atomic Force Microscope (AFM).Broader Impacts:This study will initiate the establishment of an educational and research infrastructure forNanomanufacturing at the University of Nebraska-Lincoln (UNL) that will be accessibleto researchers from UNL and other U.S. universities. The success of the project will leadto the development of a new graduate/undergraduate course on Nanomanufacturing. Theproject results will be demonstrated to high school teachers and students on a regularbasis. A collaborative research with researchers at the Warsaw University of Technologywill be planned by simultaneously submitting proposals to US and EU research agencies.

纳米科学和纳米技术在生物、光学、电信、材料和电子等各个领域的广泛研究有望带来新颖且可持续的技术和产品。为了实现这一承诺，需要一套新的制造工艺和制造范例来进行工业规模生产。最近举办的 NSF 非制造和加工研讨会建议采用自下而上（例如电铸和组装）和自上而下（例如 EDM、ECM、激光和蚀刻）工艺作为生成 1D、2D 和 3D 纳米结构和器件的潜在技术。该 SGER 提案寻求资助研究开发纳米电化学加工（Nano-ECM）工艺的可行性。电化学加工 (ECM) 工艺是一种阳极溶解工艺，可逐个原子选择性地去除材料，从而避免后处理操作。由于 ECM 是一种非热、非机械接触工艺，因此可以产生无毛刺和无应力的表面。微 ECM 工艺已证明在加工任意 3D 微形状方面非常成功。因此，ECM 似乎是自上而下的纳米加工工艺之一的理想候选者。然而，为了实现纳米 ECM 工艺，必须考虑和解决许多科学和技术障碍以及相关风险。 智力价值：这项研究将为电化学沉积和溶解的最新研究建立一个广泛而全面的知识库。纳米尺度及相关科学技术壁垒。将尝试开发一个数学模型来描述纳米 ECM 过程，通过考虑非常小的间隙下的质量传输过程、质量传输的耦合模式、法拉第过程的耦合以及反应离散事件的统计方面。纳米 ECM 单元将使用原子力显微镜 (AFM) 进行组装。 更广泛的影响：这项研究将在内布拉斯加大学林肯分校 (UNL) 建立纳米制造教育和研究基础设施，内布拉斯加大学林肯分校和内布拉斯加大学林肯分校的研究人员可以使用该基础设施其他美国大学。该项目的成功将导致新的纳米制造研究生/本科生课程的开发。项目成果将定期向高中教师和学生展示。将计划与华沙理工大学的研究人员进行合作研究，同时向美国和欧盟研究机构提交提案。