SBIR Phase I: Microscale Interferometric Sensor for High Speed MEMS Metrology

SBIR 第一阶段：用于高速 MEMS 计量的微型干涉传感器

• 批准号: 0319184
• 负责人: Thomas Kurfess
• 金额: $ 8.73万
• 依托单位: MEMScan, Incorporated
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2004-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319184&HistoricalAwards=false
• 关键词: SBIR; Phase; Microscale; Interferometric; Sensor

This SBIR Phase I project investigate the scientific and technical feasibility of an innovative micromachined optical interferometer as a quality control tool for MEMS production. One of the barriers to the growth of MEMS both as an enabling technology and as a new market is quality control. Quality control not only provides quality assurance but also it provides feedback to optimize the design, fabrication and assembly processes involved. The proposed microscale position sensing grating interferometer (uPSGI) with electrostatically actuated grating is itself microfabricated and integrated with optoelectronics. It measures the displacement of MEMS with high resolution (sub-nm) and bandwidth ( MHz). In this project, a uPSGI with movable grating will be fabricated and integrated into a microscope objective. The performance of the interferometric will be tested on dynamic MEMS devices and the feasibility of parallel array operation will be evaluated. The proposed technology converts the large-scale interferometric metrology system to a miniature sensor using a patented technology. It can be tailored for specific needs of MEMS manufacturers to reduce manufacturing costs, lead-time and waste of material and to increase product reliability. Potential customers include all the MEMS manufacturing companies.

这个SBIR I期项目研究了创新的微机械光学干涉仪作为MEMS生产的质量控制工具的科学和技术可行性。 MEMS作为一种有利的技术和新市场的增长的障碍之一是质量控制。质量控制不仅提供质量保证，而且还提供了反馈，以优化涉及的设计，制造和组装过程。提出的具有静电致使光栅的微观尺寸感测光栅干涉仪（UPSGI）本身是微生物的，并与光电子学整合在一起。它测量了具有高分辨率（子-NM）和带宽（MHz）的MEM的位移。在这个项目中，将制造具有可移动光栅的UPSGI并集成到显微镜目标中。干涉测量值的性能将在动态MEMS设备上进行测试，并将评估并行阵列操作的可行性。提出的技术将大规模的干涉测量系统转换为使用专利技术的微型传感器。它可以针对MEMS制造商的特定需求进行量身定制，以降低制造成本，交货时间和浪费材料并提高产品可靠性。潜在客户包括所有MEMS制造公司。