Contacts to Group III Nitride Semiconductor Alloys

III 族氮化物半导体合金联系人

• 批准号: 0308786
• 负责人: Suzanne Mohney
• 金额: --
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-06-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0308786&HistoricalAwards=false
• 关键词: Contacts; Group; III; Nitride; Semiconductor

This project addresses ohmic contacts to the group III nitride semiconductor alloys. In particular, compositional shifts in semiconductor alloys when contacts are annealed will be investigated. This follows recent observations of enrichment of Al in Alx Ga1-x N and preferential incorpora-tion of Ga in annealed Ni, Pd and Au contacts. The influence of the type of metal (late versus early transition metal) and composition of the semiconductor alloy (Alx Ga1-x N, Inx Al1-x N or Inx Ga1-x N) will be studied in order to develop a thermodynamic and kinetic framework to de-scribe the phenomenon. The effect of a compositional shift in the semiconductor alloy on the electrical properties of the contacts will also be evaluated. Materials characterization efforts will rely primarily on transmission electron microscopy, x-ray photoelectron spectroscopy and scan-ning Auger microscopy, while electrical characterization will include current-voltage, capaci-tance-voltage, and ohmic contact resistance measurements. %%% The project addresses fundamental research issues associated with electronic/photonic materials having technological relevance. Basic advances in electrical contacts to the group III nitride semiconductor alloys will benefit efforts to develop solid state emitters for energy-efficient light-ing, and transistors that operate at high power and high frequencies for mobile communications. The project also creates an opportunity for the training of a graduate student and one or more un-dergraduate students. Additionally, the principal investigator will incorporate aspects of her re-search program into her classroom instruction. Her outreach activities-Summer Research Opportunities Program for minority students; Women in Science and Engineering Research; Nittany Camp (Science Camp for 6th and 7th grade Girls) promote science beyond the traditional walls of the unversity. ***

该项目致力于解决 III 族氮化物半导体合金的欧姆接触问题。特别是，将研究触点退火时半导体合金的成分变化。这是继最近观察到 Alx Ga1-x N 中 Al 富集以及退火 Ni、Pd 和 Au 接触中 Ga 优先掺入之后的结果。将研究金属类型（后过渡金属与早期过渡金属）和半导体合金（Alx Ga1-x N、Inx Al1-x N 或 Inx Ga1-x N）成分的影响，以便开发热力学和动力学模型描述现象的框架。还将评估半导体合金成分变化对触点电性能的影响。材料表征工作将主要依靠透射电子显微镜、X 射线光电子能谱和扫描俄歇显微镜，而电气表征将包括电流-电压、电容-电压和欧姆接触电阻测量。 %%% 该项目解决与具有技术相关性的电子/光子材料相关的基础研究问题。 III族氮化物半导体合金电接触方面的基本进展将有利于开发用于节能照明的固态发射器以及用于移动通信的高功率和高频晶体管。该项目还为研究生和一名或多名本科生的培训创造了机会。此外，首席研究员将把她的研究计划的各个方面纳入她的课堂教学中。她的外展活动——针对少数族裔学生的夏季研究机会计划；科学与工程研究领域的女性； Nittany Camp（针对六年级和七年级女生的科学营）致力于在大学的传统围墙之外推广科学。 ***