AFM-assisted, Nanometer-scale Modification of Semiconductor Chips

AFM 辅助的半导体芯片纳米级改性

基本信息

批准号：
9980770
负责人：
William Ducker
金额：
$ 52万
依托单位：
Virginia Polytechnic Institute and State University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1999
资助国家：
美国
起止时间：
1999-09-15 至 2003-08-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9980770&HistoricalAwards=false
关键词：
AFM assisted Nanometer scale Modification

项目摘要

William A. Ducker, Department of Chemistry, Virginia TechMichael A. Calter, Department of Chemistry, University of RochesterNSF Proposal 9980770; Virginia Tech Proposal 99-1519-02AFM -assisted, Nanometer-scale Modification of Semiconductor ChipsThe goal of this Engineering Microsystems: "XYZ" on a Chip project is to develop a new technique for writing on a very small scale (nanolithography), and to apply nanolithography to the construction of a cell membrane on an electrode. Enzymes are mounted on the working tip of an Atomic Force Microscope (AFM) force sensor and the enzymes are used to perform a specific chemical reaction at a specific location dictated by the microscope. The initial objectives are to attach enzymes to the tips while maintaining chemical reactivity, and to synthesize a surface film that is easily modified by the enzyme. An AFM is also used to verify the accuracy of the writing process. To protect the delicate enzyme-tip, an AFM that has two separate probes is being developed. One probe is for writing and one is for reading in the same location. The enzyme-assisted nanolithographic technique will be used to fabricate a cell membrane on a semiconductor chip. The natural cell scaffold that supports the cell membrane will be attached to the chip by using the AFM enzyme tip to perform reactions at specific locations.The development of writing techniques with high spatial and chemical specificity enhances our ability to manufacture miniaturize electronic components and to perform parallel drug screening. The development of a realistic chip-mounted membrane is a key step in the preparation of biosensors.

William A. Ducker，弗吉尼亚理工大学化学系 Michael A. Calter，罗切斯特大学化学系 NSF 提案 9980770；弗吉尼亚理工大学提案 99-1519-02AFM 辅助的半导体芯片纳米级修改该工程微系统：芯片上的“XYZ”项目的目标是开发一种用于极小规模写入（纳米光刻）的新技术，并将纳米光刻技术应用于电极上细胞膜的构建。酶安装在原子力显微镜 (AFM) 力传感器的工作尖端上，酶用于在显微镜指定的特定位置执行特定的化学反应。最初的目标是将酶附着在尖端上，同时保持化学反应性，并合成易于被酶修饰的表面膜。 AFM 还用于验证写入过程的准确性。为了保护脆弱的酶尖端，正在开发具有两个独立探针的 AFM。在同一位置，一个探针用于写入，一个用于读取。酶辅助纳米光刻技术将用于在半导体芯片上制造细胞膜。支撑细胞膜的天然细胞支架将通过AFM酶尖附着在芯片上，在特定位置进行反应。具有高空间和化学特异性的写入技术的发展增强了我们制造微型电子元件和执行的能力。平行药物筛选。开发真实的芯片安装膜是生物传感器制备的关键步骤。