Research Equipment Grant for Development of a High-Speed Ultra-Accurate Six DOF Manipulator Based on Two-Dimensional Linear Motors

研究设备资助用于开发基于二维直线电机的高速超精确六自由度机械臂

• 批准号: 9977693
• 负责人: Farshad Khorrami
• 金额: --
• 依托单位: Polytechnic University of New York
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-10-01 至 2003-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9977693&HistoricalAwards=false
• 关键词: Research; Equipment; Grant; Development; Speed

9977693KhorramiThis project will develop a new type of robot arm for a High-Speed Ultra-Accurate Six DOF Manipulator Based on Two-Dimensional Linear Motors to enhance and complement and current research efforts. Planar multi-robot systems based on commercial Sawyer motors provide uniform performance over their entire workspace, offering high speeds, accelerations, and precision. They also offer mechanical and kinematic simplicity, modularity, large motion ranges, and a short path to mechanical ground. In fact such a system can provide a multiple robot table top manufacturing system. These systems are now commercially available from multiple manufactures and are used for a range of applications from wafer probing to circuit board assembly. Planar robot systems use has increased tremendously because of the current trend to smaller devices and the requirement for higher accuracy placement. Unfortunately, primarily because Sawyer motors are operated as open-loop micro-step motors, they can miss steps, have long settle times, and are operated short of their potential capabilities due to loss of synchrony between motor and platen teeth. These limitations can be overcome using a new novel, very high resolution (0.12um; microns), 2D position sensor that was developed by Dr. Ish-Shalom and patented by IBM. The PI has fabricated sensors to his motor. Not only this sensor provides a means for closed-loop control of this motor and therefore higher resolution, but also the point-to-point move time of the motor may be decreased through active damping to achieve better settling times. Furthermore, a higher stiffness may also be achieved. Through the NSF support of previous effort, the PI has fabricated sensors, designed housing for them, and have attached the sensors to the motors for feedback purposes. This grant will provide for additional equipment to develop a six degree-of-freedom manipulator based on two-dimensional Sawyer motors. The manipulator is direct drive and actuated by three Sawyer motors. The manipulator mechanism is basically a tripod with Sawyer motors at its base to provide linear motions of the tripod legs. By properly coordinating the motors, three-axis of translations and three-axis of rotations are produced at the top of the tripod. By proper design of the tripod and a good design of its kinematic parameters, large translations (unlimited X and Y depending on the size of platen used and a few inches of Z movement) and rotations (possibly up to 160 degrees) at the end-effector can, be generated. This equipment will provide an excellent basis to complement the PI's current research efforts and to develop the aforementioned six DOF manipulator.

9977693Khorrami该项目将开发一种新型机器人手臂，用于基于二维线性电机的高速超精确六自由度机械臂，以增强和补充当前的研究工作。基于商用 Sawyer 电机的平面多机器人系统在整个工作空间内提供一致的性能，提供高速度、加速度和精度。它们还提供机械和运动学的简单性、模块化、大运动范围以及到机械接地的短路径。事实上这样的系统可以提供多机器人桌面制造系统。这些系统现在可从多家制造商处购买，并用于从晶圆探测到电路板组装的一系列应用。由于当前设备小型化的趋势以及对更高精度放置的要求，平面机器人系统的使用已大大增加。不幸的是，主要是因为 Sawyer 电机作为开环微步电机运行，因此它们可能会丢失步数、稳定时间较长，并且由于电机和压盘齿之间失去同步而无法发挥其潜在能力。使用由 Ish-Shalom 博士开发并已获得 IBM 专利的全新新型超高分辨率（0.12 微米；微米）2D 位置传感器可以克服这些限制。 PI 为他的电机制造了传感器。该传感器不仅提供了一种对该电机进行闭环控制的方法，因此具有更高的分辨率，而且还可以通过主动阻尼来减少电机的点对点移动时间，以实现更好的稳定时间。此外，还可以获得更高的刚度。通过 NSF 先前工作的支持，PI 制造了传感器，为其设计了外壳，并将传感器连接到电机上以用于反馈目的。这笔赠款将提供额外的设备来开发基于二维 Sawyer 电机的六自由度机械臂。机械手是直接驱动的，由三个 Sawyer 电机驱动。操纵器机构基本上是一个三脚架，其底部带有 Sawyer 电机，以提供三脚架腿的线性运动。通过正确协调电机，在三脚架顶部产生三轴平移和三轴旋转。通过三脚架的正确设计及其运动学参数的良好设计，最终可实现大平移（无限的 X 和 Y 取决于所用压板的尺寸以及几英寸的 Z 运动）和旋转（可能高达 160 度）-可以生成效应器。该设备将为补充 PI 目前的研究工作以及开发上述六自由度机械臂提供良好的基础。