Cutting Behavior and Process Monitoring During Grinding of Ceramics Using CVD-Tools

使用 CVD 工具磨削陶瓷期间的切削行为和过程监控

• 批准号: 136745273
• 负责人: Dr.-Ing. Hans-Werner Hoffmeister
• 金额: --
• 依托单位: Departamento de Engenharia Mecatrônica e de Sistemas Mecânicos
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2009
• 资助国家: 德国
• 起止时间: 2008-12-31 至 2014-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/136745273?language=en
• 关键词: Cutting; Behavior; Process; Monitoring; During

Microsystems technology has found applications in a wide range of everyday live, from medicine to defence systems, from communication to sports and its importance has been continuously growing. The machining techniques have the advantage of being very flexible and able to produce structures in nearly all materials. This makes them very useful for small batches or single parts, as UV masks were the accuracy and production time requirements can be obtained with convention machining process. Nevertheless there are no systems allowing detecting the breaking of micro tools during the process. Due to the very small dimensions, specially the diameter of tools, and associated with its inherent fragility, it is even hard to detect a tool breakage. Thus a tool failure cannot be seen until the produced structure is checked with a confocal microscope. The aim of this proposal is to develop and integrate a tool failure detection system and an optical inspection in order to provide an in process monitoring system during the machining of micro parts. To do so acceleration sensors and a force measurement device are integrated in a micro machine. The relationship between the in process measurement system and tool failure will be investigated. Thus the limits guaranteeing a sufficient cutting behaviour will be set. To do so hard to cut piezo composite materials are going to be investigated due to its machinability by means of conventional tools and using diamond CVD-pencils and CVD-grinding wheels.

微系统技术已广泛应用于日常生活中，从医学到防御系统，从通信到体育，其重要性不断增长。加工技术的优点是非常灵活，能够用几乎所有材料生产结构。这使得它们对于小批量或单个零件非常有用，因为 UV 掩模可以通过传统加工工艺获得精度和生产时间要求。然而，没有系统可以检测微型工具在此过程中的损坏。由于尺寸非常小，特别是刀具的直径，并且其固有的脆弱性，甚至很难检测到刀具破损。因此，只有使用共焦显微镜检查所产生的结构，才能看到工具故障。该提案的目的是开发和集成刀具故障检测系统和光学检查，以便在微型零件加工过程中提供过程监控系统。为此，将加速度传感器和力测量装置集成在微型机器中。将研究过程中测量系统和工具故障之间的关系。因此，将设定保证足够切割行为的限制。为了做到这一点，我们将对难以切割的压电复合材料进行研究，因为它可以通过传统工具并使用金刚石 CVD 铅笔和 CVD 砂轮进行机械加工。