Investigation of Diamond-Forming Flames Using Advanced Laser Diagnostics and Laser Enhancement of the Deposition Rate

使用先进激光诊断和激光增强沉积速率研究钻石形成火焰

• 批准号: 9732532
• 负责人: Robert Lucht
• 金额: $ 19.02万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 1998-10-27
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9732532&HistoricalAwards=false
• 关键词: Investigation; Diamond; Forming; Flames; Using

Abstract - Lucht and Glumac This is a detailed investigation, both experimental and theoretical, of the chemistry and transport processes in low-pressure diamond-forming flames. The focus is on profiles of temperature and concentrations of radical species near the deposition substrate. Extensive measurements of temperature and of the radical species H (atomic hydrogen), OH (hydroxyl), C (atomic carbon), and CH (methyne) are performed for a range of flame pressures, stoichiometries, and total mass flow rates and are compared with numerical flame models. The experimental work is performed in Dr. Robert Lucht's laboratory which has the necessary low-pressure flame apparatus and laser diagnostic equipment; the modeling is done in Dr. Nick Glumac's laboratory. Temperature measurements are made using hydrogen coherent anti-Stokes Raman spectroscopy (H2 CARS). The emphasis in the diagnostic studies is in resolving the gradients in the near-substrate region. A flame model that has been applied successfully in other flame synthesis environments is used. The flame temperature profile and process parameters are used as input, and the model predicts the species profiles; differences between experiment and computation are investigated with a sensitivity analysis to explore the influences of kinetic and transport rates.

摘要 - Lucht 和 Glumac 这是对低压金刚石形成火焰中的化学和传输过程的详细实验和理论研究。 重点是沉积基板附近的温度分布和自由基物质浓度。 对一系列火焰压力、化学计量和总质量流量进行温度和自由基物种 H（原子氢）、OH（羟基）、C（原子碳）和 CH（次甲基）的广泛测量，并进行比较与数值火焰模型。 实验工作在Robert Lucht博士的实验室进行，该实验室拥有必要的低压火焰装置和激光诊断设备；建模是在 Nick Glumac 博士的实验室完成的。 使用氢相干反斯托克斯拉曼光谱（H2 CARS）进行温度测量。 诊断研究的重点是解决近基质区域的梯度。 使用已在其他火焰合成环境中成功应用的火焰模型。 火焰温度分布和工艺参数作为输入，模型预测物种分布；通过敏感性分析来研究实验和计算之间的差异，以探索动力学和传输速率的影响。