CAREER: Atomic Mechanisms at Interfaces and Defects in Semiconducting Materials

职业：半导体材料界面和缺陷的原子机制

• 批准号: 9733895
• 负责人: Nigel Browning
• 金额: $ 30万
• 依托单位: University of Illinois at Chicago
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-04-01 至 2002-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9733895&HistoricalAwards=false
• 关键词: CAREER; Atomic; Mechanisms; Interfaces; Defects

9733895 Browning The objective of this CAREER project is to develop a comprehensive research and education program linked to the next generation of semiconducting materials and devices. The project strives for an atomic level understanding of structure-property relationships in semiconducting materials, and a parallel materials science education program. The research will utilize recently developed correlated atomic resolution Z-contrast imaging and electron energy loss spectroscopy (EELS) techniques in a scanning transmission electron microscope (STEM) to probe internal interfaces and defects in semiconductors with the goal of determining atomic structure, composition and electronic structure at individual atomic sites. Electronic and optical properties of individual interfaces or defects will be modeled and the overall material properties constructed from fundamental atomic properties. Unlike traditional high-resolution imaging techniques, where images and simulations must be matched, this approach allows real materials defects and interfaces to be investigated. Research will include GaN and SiC, ITO/n-GaAs, ZnSe/Fe magnetic multilayers, and the effect of nitrogen on the oxidation of Si and SiGe for VLSI. The project involves established collaborations with university materials growth groups and with industry, incorporating feedback between growth and characterization related to advanced device concepts and developments. Atomic scale research studies of semiconductors are ideal for the integration of research and education. Links between the operation of an everyday object such as a CD-player or computer, and the atomic structure of its components, will be used to emphasize basic features of materials science, and the excitement of discovery. Similar project based learning ideas will also be incorporated into the undergraduate curriculum. The PI will be teaching a new course in experimental materials physics, where the focus will be on fundamental character ization and applications of materials. Running parallel to this will be a graduate course, where experiments will be carried out at higher levels of sophistication, and related to real world applications. %%% The project addresses leading edge research and education issues in a topical area of materials science having high technological relevance. The research will contribute basic materials science knowledge at a fundamental level to electronic materials and advanced device concepts. An important feature of the program is the emphasis on education, and on the integration of research and education through the training of students in a fundamentally and technologically significant research area. ***

9733895该职业项目的目标是制定与下一代半导体材料和设备有关的全面研究和教育计划。该项目致力于对半导体材料中的结构 - 特性关系的理解以及平行的材料科学教育计划。该研究将利用最近开发的相关原子分辨率z对比成像和电子能量损失光谱（EELS）技术在扫描传输电子显微镜（STEM）中以探测半导体的内部接口和缺陷，其目的是确定原子结构，组成和电子结构，组成和电子结构，组成和电子结构，组成和电子结构单个原子位点的结构。将建模各个接口或缺陷的电子和光学特性，并根据基本原子特性构建的整体材料特性。与必须匹配图像和模拟的传统高分辨率成像技术不同，这种方法可以研究真实的材料缺陷和接口。研究将包括GAN和SIC，ITO/N-GAA，ZnSE/Fe磁多层，以及氮对Si和SigE氧化对VLSI的影响。该项目涉及与大学材料成长小组和行业建立的合作，并结合了与先进设备概念和开发有关的增长与表征之间的反馈。半导体的原子量表研究是研究和教育整合的理想选择。日常对象（例如CD播放器或计算机）的操作与其组件的原子结构之间的链接将用于强调材料科学的基本特征与发现的兴奋。类似的基于项目的学习想法也将纳入本科课程中。 PI将教授实验材料物理学的新课程，重点将放在材料的基本特征和应用上。与此平行的运行将是一门研究生课程，在该课程中，实验将以较高的复杂性进行，并且与现实世界的应用有关。 %%％该项目解决了具有很高技术相关性的材料科学领域的领先研究和教育问题。 该研究将在基本层面上为电子材料和高级设备概念提供基础材料科学知识。该计划的一个重要特征是强调教育，以及通过在根本和技术意义上的研究领域中培训学生的研究和教育的整合。 ***