In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools

集群工具内多晶硅形成的在线过程监测和控制

• 批准号: 9460472
• 负责人: Peter Solomon
• 金额: $ 7.49万
• 依托单位: Advanced Fuel Research, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-06-01 至 1996-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9460472&HistoricalAwards=false
• 关键词: Line; Process; Monitoring; Control; Poly

This Small Business Innovation Research Project will develop a Fourier Transform Infrared (FT-IR) reflectance spectrometer for in-line monitoring and control of poly-silicon processes within a cluster tool. Advanced Fuel Research. Inc. (AFR) has patented and developed a FTIR based method which eliminates many of the problems associated with present techniques. 1) It can determine accurate real-time thickness for as-deposited poly-silicon film inside the cluster tool. 2) It can determine the real-time doping density in the poly-silicon film in nondestructive way; 3) It can monitor the thicknesses and doping density for poly-silicon processes on the product wafer directly; 4) It can determine the thicknesses of the cap SiO2 Layer and the thermal SiO2 layer, simultaneously and independently. A field test in the cooldown chamber of a Centura 5200 cluster tool at Texas Instruments demonstrated the ability of on-line wafer-by-wafer data collection. An ex-situ analysis of poly-silicon product wafers, achieved excellent results. A software package is developed based on this method, and the first commercial sale is to SEMATECH. This project will be led by Advanced Fuel Research, Inc. (AFR). Texas Instruments, Inc. (11) will be a subcontractor. SEMATECH will be a collaborator. Phase I will prove the feasibility of in-line monitoring during the poly silicon processes in a Centura 5200 cluster tool. TI will fabricate calibration samples. SEMATECH will provide samples from different IC manufacturing. AFR will measure the ex-situ film characteristics, and improve the analysis method and software. Field tests will be done at TI. Phase II will implement the monitoring techniques and demonstrate the improved reliability of the process.

该小型企业创新研究项目将开发傅里叶变换红外 (FT-IR) 反射光谱仪，用于在集群工具内在线监测和控制多晶硅工艺。先进燃料研究。 Inc. (AFR) 已获得专利并开发了一种基于 FTIR 的方法，该方法消除了与现有技术相关的许多问题。 1) 可以准确实时测定集束设备内沉积的多晶硅薄膜的厚度。 2）能够无损实时测定多晶硅薄膜中的掺杂浓度； 3）可直接监测产品晶圆上多晶硅工艺的厚度和掺杂浓度； 4) 可同时独立测定帽层SiO2层和热SiO2层的厚度。在德州仪器 (TI) Centura 5200 集群工具的冷却室中进行的现场测试证明了在线逐晶圆数据收集的能力。对多晶硅产品晶圆的异位分析取得了优异的结果。基于该方法开发了软件包，并首次商业销售给SEMATECH。该项目将由 Advanced Fuel Research, Inc. (AFR) 领导。德州仪器 (TI) (11) 将成为分包商。 SEMATECH 将成为合作者。第一阶段将证明在 Centura 5200 集群工具中进行多晶硅工艺在线监控的可行性。 TI 将制作校准样品。 SEMATECH将提供来自不同IC制造商的样品。 AFR将测量异位薄膜特性，并改进分析方法和软件。现场测试将在 TI 进行。第二阶段将实施监测技术并证明该过程的可靠性得到提高。