In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools

集群工具内多晶硅形成的在线过程监测和控制

• 批准号: 9460472
• 负责人: Peter Solomon
• 金额: $ 7.49万
• 依托单位: Advanced Fuel Research, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-06-01 至 1996-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9460472&HistoricalAwards=false
• 关键词: Line; Process; Monitoring; Control; Poly

This Small Business Innovation Research Project will develop a Fourier Transform Infrared (FT-IR) reflectance spectrometer for in-line monitoring and control of poly-silicon processes within a cluster tool. Advanced Fuel Research. Inc. (AFR) has patented and developed a FTIR based method which eliminates many of the problems associated with present techniques. 1) It can determine accurate real-time thickness for as-deposited poly-silicon film inside the cluster tool. 2) It can determine the real-time doping density in the poly-silicon film in nondestructive way; 3) It can monitor the thicknesses and doping density for poly-silicon processes on the product wafer directly; 4) It can determine the thicknesses of the cap SiO2 Layer and the thermal SiO2 layer, simultaneously and independently. A field test in the cooldown chamber of a Centura 5200 cluster tool at Texas Instruments demonstrated the ability of on-line wafer-by-wafer data collection. An ex-situ analysis of poly-silicon product wafers, achieved excellent results. A software package is developed based on this method, and the first commercial sale is to SEMATECH. This project will be led by Advanced Fuel Research, Inc. (AFR). Texas Instruments, Inc. (11) will be a subcontractor. SEMATECH will be a collaborator. Phase I will prove the feasibility of in-line monitoring during the poly silicon processes in a Centura 5200 cluster tool. TI will fabricate calibration samples. SEMATECH will provide samples from different IC manufacturing. AFR will measure the ex-situ film characteristics, and improve the analysis method and software. Field tests will be done at TI. Phase II will implement the monitoring techniques and demonstrate the improved reliability of the process.

这个小型企业创新研究项目将开发一个傅立叶变换红外（FT-IR）反射率光谱仪，用于在群集工具中对聚硅过程的在线监视和控制。高级燃料研究。 Inc.（AFR）已获得专利并开发了一种基于FTIR的方法，该方法消除了与当前技术相关的许多问题。 1）它可以确定群集工具中的积分多硅膜的准确实时厚度。 2）它可以以无损的方式确定多丝膜膜中的实时掺杂密度； 3）它可以直接监测产品晶片上的多丝硅过程的厚度和掺杂密度； 4）它可以同时独立地确定CAP SIO2层和热SiO2层的厚度。德州仪器的Centura 5200群集工具的冷却室中的现场测试证明了在线晶片逐片数据收集的能力。对聚硅产物晶片的前原位分析取得了出色的效果。根据此方法开发了软件包，第一次商业销售是向Sematech进行。该项目将由Advanced Fuel Research，Inc。（AFR）领导。 Texas Instruments，Inc。（11）将是分包商。 Sematech将是合作者。第一阶段将证明在Centura 5200群集工具中，在多硅过程中进行在线监测的可行性。 Ti将制造校准样品。 Sematech将提供来自不同IC制造的样品。 AFR将衡量前式膜特征，并改善分析方法和软件。现场测试将在Ti上进行。第二阶段将实施监视技术，并证明该过程的可靠性提高。