A New Method of Synthesis for Micro-Electro-Mechanical Systems in a Single Phase: From Function and Fabrication

单相微机电系统合成的新方法：从功能和制造角度

• 批准号: 9313330
• 负责人: Sridhar Kota
• 金额: $ 24.6万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-09-15 至 1996-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9313330&HistoricalAwards=false
• 关键词: New; Method; Synthesis; Micro; Electro

9313330 Kota This project introduces a novel class of mechanical systems called compliant mechanisms for micro applications. Compliant mechanisms are single-piece flexible structures that deliver the desired motion by undergoing elastic deformation as opposed to the rigid body motions of conventional mechanisms. Thus, the principal objective of the project is to explore the possibility of using compliant mechanisms in the micro realm to meet the atypical design challenges posed by Microelectromechanical systems (MEMS). The study of MEMS is a fast growing area of research that has an immense potential to help accomplish useful tasks in numerous applications that involve mechanical manipulation at the micro level. This project addresses the design aspects of such systems. Many researchers have demonstrated the feasibility of their microfabrication technologies by building a variety of micromechanical elements. They include rotary motors, linear actuators and resonators, springs, grippers and gears all of which are in the size range of few tens of microns to few hundreds of microns. The limited capabilities of the micromachining techniques give way to new exigencies in fabrication and design at micro level that are nonexistent in the macro machinery.

9313330 KOTA这个项目引入了一类新型的机械系统，称为微型应用机制。 合规机理是单件柔性结构，通过经历弹性变形而不是常规机制的刚体运动来提供所需的运动。 因此，该项目的主要目的是探索使用微型领域中使用合规机理的可能性，以应对微机电系统（MEMS）提出的非典型设计挑战。 MEMS的研究是一个快速增长的研究领域，具有巨大的潜力，可以帮助在涉及微型机械操作的许多应用中完成有用的任务。 该项目解决了此类系统的设计方面。 许多研究人员通过构建各种微机械元素来证明其微加工技术的可行性。它们包括旋转电动机，线性致动器和谐振器，弹簧，握把和齿轮，所有这些都在几十微米到几百微米的尺寸范围内。 微加工技术的有限能力让位于微型机械中不存在的微型制造和设计的新紧急情况。