Dynamic of R.F. Discharges for Materials Etching (REU SUPPLEMENT)

R.F.动态

• 批准号: 8910827
• 负责人: Michael Lieberman
• 金额: $ 26.95万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1990
• 资助国家: 美国
• 起止时间: 1990-01-15 至 1992-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8910827&HistoricalAwards=false
• 关键词: Dynamic; R.F.; Discharges; Materials; Etching

This proposal is for continuation of research on r.f. plasma discharges for use in materials processing of microelectronic circuits. The program involves (a) the development of an electron beam probe and other plasma diagnostics to measure discharge electric fields, species densities, and other parameters; and (b) the development of analytical discharge models and numerical codes to explore the variation of plasma and sheath parameters with control variables. The electron beam probe measurements will be compared to tuned high- impedance Langmuir probe and microwave density measurements, voltage, current and r.f. power measurements. These results will be compared with the predictions of the analytical, asymmetric discharge models and used to guide further model development. The analytical modeling of capacitive r.f. discharges will be extended to asymmetric discharge geometries. A spherical shell model that is in the initial stage of development will be further developed and used to compare with experiments. The model will be extended to finite length cylindrical and coaxial geometries that are used in industry. Magnetic enhancement of r.f. discharges will be modeled. The results will be incorporated into a computer code. Experimental measurements and results of computer simulation will be used to guide the further development of the analytical models and codes.

该提案是为了继续对 r.f. 进行研究。用于微电子电路材料加工的等离子体放电。 该计划涉及 (a) 开发电子束探针和其他等离子体诊断技术，以测量放电电场、物质密度和其他参数； (b) 开发分析放电模型和数值代码，以探索等离子体和鞘层参数随控制变量的变化。 电子束探针测量结果将与调谐高阻抗朗缪尔探针和微波密度测量结果、电压、电流和射频进行比较。功率测量。 这些结果将与分析的不对称放电模型的预测进行比较，并用于指导进一步的模型开发。 电容式射频的分析模型放电将扩展到不对称放电几何形状。 处于开发初期的球壳模型将进一步开发并用于与实验进行比较。 该模型将扩展到工业中使用的有限长度圆柱形和同轴几何形状。 射频磁增强放电将被建模。 结果将被纳入计算机代码中。 实验测量和计算机模拟结果将用于指导分析模型和代码的进一步开发。